Inventor · disambiguated record
Ulf-Carsten Kirschstein
Also filed as: KIRSCHSTEIN ULF-CARSTEN
6 granted patents·46 citations·filing 1999–2009
80Inventor score
Top patents by PatentIndex Score
6 records- 0174US6639225B2Six-axis positioning system having a zero-magnetic-field spaceLEICA MICROSYS LITHOGRAPHY LTD·Filed 2001·Granted Oct 28, 2003·27 cites·12 claims
- 0266US8267582B2Table guided by aerostatic bearing elements for vacuum applicationSCHUBERT GERHARD·Filed 2009·Granted Sep 18, 2012·3 cites·10 claims
- 0359US8529130B2Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum applicationSCHUBERT GERHARD·Filed 2009·Granted Sep 10, 2013·2 cites·17 claims
- 0458US8496221B2Aerostatically guided table system for vacuum applicationSCHUBERT GERHARD·Filed 2009·Granted Jul 30, 2013·1 cites·17 claims
- 0536US6426860B1Holding device for a substrateLEICA MICROSYS LITHOGRAPHY LTD·Filed 1999·Granted Jul 30, 2002·7 cites·16 claims
- 0631US6480369B1System for receiving and retaining a substrateLEICA MICROSTSTEMS LITHOGRAPHY·Filed 1999·Granted Nov 12, 2002·6 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →