Inventor · disambiguated record
Vassil Spasov
Also filed as: SPASOV VASSIL
2 granted patents·13 citations·filing 2006–2008
55Inventor score
Top patents by PatentIndex Score
2 records- 0184US7838832B1Electron beam apparatus and inspection method using dual illumination beams with dynamically controllable offsetsKLA TENCOR CORP·Filed 2008·Granted Nov 23, 2010·11 cites·20 claims
- 0254US7566873B1High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatusKLA TENCOR TECH CORP·Filed 2006·Granted Jul 28, 2009·2 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →