Inventor · disambiguated record

Venkata Siva Chaithanya Chillara

Also filed as: CHILLARA VENKATA SIVA CHAITHANYA

0 granted patents·2 pending applications·0 citations·filing 2022–2022

Technology areasG01B G03F

Files withASML HOLDING NV1 ASML NETHERLANDS BV1

Top patents by PatentIndex Score

2 records

0154US2024167809A1Metrology systems, measurement of wear systems and methods thereofASML HOLDING NV·Filed 2022·Application pending·0 cites
0253US2024419088A1Method and apparatus for lithographic imagingASML NETHERLANDS BV·Filed 2022·Application pending·0 cites

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