Inventor · disambiguated record
Venugopal Vellanki
Also filed as: VELLANKI VENUGOPAL
8 granted patents·3 pending applications·23 citations·filing 2012–2024
82Inventor score
Top patents by PatentIndex Score
11 records- 0192US10514614B2Process variability aware adaptive inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Dec 24, 2019·8 cites·20 claims
- 0289US11176307B2Method and system for pattern configurationASML NETHERLANDS BV·Filed 2017·Granted Nov 16, 2021·4 cites·20 claims
- 0387US11238189B2Process window optimizerASML NETHERLANDS BV·Filed 2018·Granted Feb 1, 2022·3 cites·20 claims
- 0487US11003093B2Process variability aware adaptive inspection and metrologyASML NETHERLANDS BV·Filed 2019·Granted May 11, 2021·5 cites·25 claims
- 0584US2025053702A1Process window optimizerASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0679US9459537B2System and method to ensure source and image stabilityCAO YU·Filed 2012·Granted Oct 4, 2016·3 cites·25 claims
- 0776US12141507B2Process window optimizerASML NETHERLANDS BV·Filed 2022·Granted Nov 12, 2024·0 cites·20 claims
- 0875US12092965B2Process variability aware adaptive inspection and metrologyASML NETHERLANDS BV·Filed 2021·Granted Sep 17, 2024·0 cites·27 claims
- 0961US2024274414A1Chamber clean for dry develop of metal organic photoresistsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1059US2024404861A1Apparatus for clamping a substrate on a mono-polar electrostatic chuck for deposition of photoresist filmsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1157US11460784B2Method for determining candidate patterns from set of patterns of a patterning processASML NETHERLANDS BV·Filed 2019·Granted Oct 4, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →