Inventor · disambiguated record
Vivek R. Rao
Also filed as: RAO VIVEK · RAO VIVEK R
3 granted patents·105 citations·filing 2000–2019
68Inventor score
Top patents by PatentIndex Score
3 records- 0187US6387764B1Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growthSILICON VALLEY GROUP THERMAL·Filed 2000·Granted May 14, 2002·102 cites·17 claims
- 0279US10510570B2Systems, apparatus, and methods for purging a substrate carrier at a factory interfaceAPPLIED MATERIALS INC·Filed 2015·Granted Dec 17, 2019·3 cites·13 claims
- 0358US10903102B2Methods for purging a substrate carrier at a factory interfaceAPPLIED MATERIALS INC·Filed 2019·Granted Jan 26, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →