Inventor · disambiguated record
Vinayak Veer Vats
Also filed as: VATS VINAYAK · VATS VINAYAK V · VATS VINAYAK VEER
6 granted patents·4 pending applications·4 citations·filing 2010–2024
69Inventor score
Top patents by PatentIndex Score
10 records- 0182US11401607B2TiSiN coating methodEUGENUS INC·Filed 2017·Granted Aug 2, 2022·2 cites·20 claims
- 0277US11942365B2Multi-region diffusion barrier containing titanium, silicon and nitrogenEUGENUS INC·Filed 2018·Granted Mar 26, 2024·2 cites·30 claims
- 0370US2025087534A1Multi-region diffusion barrier containing titanium, silicon and nitrogenEUGENUS INC·Filed 2024·Application pending·0 cites
- 0469US2023151488A1Tisin coating methodEUGENUS INC·Filed 2022·Application pending·0 cites
- 0554US11217443B2Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substratesAPPLIED MATERIALS INC·Filed 2019·Granted Jan 4, 2022·0 cites·20 claims
- 0654US2024332000A1Doped silicon-containing materials with increased electrical, mechanical, and etch characteristicsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0748US11276570B2Multi-layer deposition and treatment of silicon nitride filmsAPPLIED MATERIALS INC·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
- 0846US11157661B2Process development visualization toolAPPLIED MATERIALS INC·Filed 2019·Granted Oct 26, 2021·0 cites·20 claims
- 0943US2012216712A1Composition and method for low temperature deposition of rutheniumPARANJPE AJIT·Filed 2010·Application pending·0 cites
- 1042US10950430B2Pulsed plasma deposition etch step coverage improvementAPPLIED MATERIALS INC·Filed 2019·Granted Mar 16, 2021·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →