Inventor · disambiguated record
Waikit Fung
Also filed as: FUNG WAIKIT
5 granted patents·264 citations·filing 2001–2018
84Inventor score
Top patents by PatentIndex Score
5 records- 0196US9978610B2Pulsing RF power in etch process to enhance tungsten gapfill performanceLAM RES CORP·Filed 2016·Granted May 22, 2018·19 cites·18 claims
- 0294US7078312B1Method for controlling etch process repeatabilityNOVELLUS SYSTEMS INC·Filed 2003·Granted Jul 18, 2006·163 cites·22 claims
- 0393US10395944B2Pulsing RF power in etch process to enhance tungsten gapfill performanceLAM RES CORP·Filed 2018·Granted Aug 27, 2019·9 cites·17 claims
- 0487US7163896B1Biased H2 etch process in deposition-etch-deposition gap fillNOVELLUS SYSTEMS INC·Filed 2003·Granted Jan 16, 2007·58 cites·20 claims
- 0568US7064087B1Phosphorous-doped silicon dioxide process to customize contact etch profilesNOVELLUS SYSTEMS INC·Filed 2001·Granted Jun 20, 2006·15 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →