Inventor · disambiguated record
Walter Dale Gillespie
Also filed as: GILLESPIE WALTER · GILLESPIE WALTER D · Gillespie Walter Dale
18 granted patents·6 pending applications·138 citations·filing 2003–2023
92Inventor score
Top patents by PatentIndex Score
24 records- 0195US6904073B2High power deep ultraviolet laser with long life opticsCYMER INC·Filed 2003·Granted Jun 7, 2005·78 cites·87 claims
- 0288US7366219B2Line narrowing moduleCYMER INC·Filed 2004·Granted Apr 29, 2008·20 cites·112 claims
- 0383US7535948B2Cathodes for fluorine gas discharge lasersCYMER INC·Filed 2006·Granted May 19, 2009·7 cites·26 claims
- 0475US7653112B2Line narrowing moduleCYMER INC·Filed 2008·Granted Jan 26, 2010·3 cites·8 claims
- 0573US8855166B26 KHz and above gas discharge laser systemUJAZDOWSKI RICHARD C·Filed 2012·Granted Oct 7, 2014·3 cites·19 claims
- 0672US11777271B2Method of and apparatus for extending electrode life in a laser chamberCymer LLC·Filed 2018·Granted Oct 3, 2023·1 cites·22 claims
- 0768US7633989B2High pulse repetition rate gas discharge laserCYMER INC·Filed 2005·Granted Dec 15, 2009·2 cites·9 claims
- 0868US7522650B2Gas discharge laser chamber improvementsCYMER INC·Filed 2004·Granted Apr 21, 2009·8 cites·64 claims
- 0967US6937635B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Aug 30, 2005·7 cites·16 claims
- 1065US2025219346A1Spectral feature control apparatusCymer LLC·Filed 2023·Application pending·0 cites
- 1159US7301980B2Halogen gas discharge laser electrodesCYMER INC·Filed 2004·Granted Nov 27, 2007·5 cites·82 claims
- 1258US12374853B2Control system for a plurality of deep ultraviolet optical oscillatorsCymer LLC·Filed 2020·Granted Jul 29, 2025·0 cites·19 claims
- 1357US2010097704A1Line narrowing moduleCYMER INC·Filed 2009·Application pending·0 cites
- 1455US11614012B2Nonwoven screens for dust trapping in laser discharge chambersCymer LLC·Filed 2018·Granted Mar 28, 2023·0 cites·19 claims
- 1555US7132123B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Nov 7, 2006·3 cites·5 claims
- 1654US2023017337A1Dual pulsed power system with independent voltage and timing control and reduced power consumptionCymer LLC·Filed 2020·Application pending·0 cites
- 1750US2006233214A1Hybrid electrode support barCYMER INC·Filed 2005·Application pending·0 cites
- 1849US9620920B2High pulse repetition rate gas discharge laserGILLESPIE WALTER D·Filed 2009·Granted Apr 11, 2017·0 cites·7 claims
- 1949US7230965B2Anodes for fluorine gas discharge lasersCYMER INC·Filed 2003·Granted Jun 12, 2007·1 cites·28 claims
- 2046US2006222034A16 Khz and above gas discharge laser systemCYMER INC·Filed 2005·Application pending·0 cites
- 2141US11949203B2Gas management systemCymer LLC·Filed 2019·Granted Apr 2, 2024·0 cites·20 claims
- 2238US2021194202A1Metrology for a body of a gas discharge stageCymer LLC·Filed 2019·Application pending·0 cites
- 2334US11949202B2Gas management systemCymer LLC·Filed 2018·Granted Apr 2, 2024·0 cites·21 claims
- 2424US10074953B2Erosion resistant electrodes for use in generating gas discharge laserLUO SIQI·Filed 2015·Granted Sep 11, 2018·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →