Inventor · disambiguated record
Walter Pauls
Also filed as: MILLER FREDRIC N · PAULS WALTER · PAULS WALTER L
15 granted patents·3 pending applications·241 citations·filing 1976–2025
91Inventor score
Files withZEISS CARL SMT GMBH11AMERICAN CAN CO4CARL ZEISS MULTISEM GMBH2JAMES RIVER DIXIE NORTHERN INC1
Top patents by PatentIndex Score
18 records- 0194US4125659APatterned creping of fibrous productsAMERICAN CAN CO·Filed 1976·Granted Nov 14, 1978·111 cites·15 claims
- 0293US9939730B2Optical assemblyZEISS CARL SMT GMBH·Filed 2015·Granted Apr 10, 2018·7 cites·31 claims
- 0383US11415892B2Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2021·Granted Aug 16, 2022·2 cites·9 claims
- 0480US2025060677A1Method for measuring an effect of a wavelength-dependent measuring light reflectivity and an effect of a polarization of measuring light on a measuring light impingement on a lithography maskZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0579US10001631B2Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film elementZEISS CARL SMT GMBH·Filed 2014·Granted Jun 19, 2018·6 cites·40 claims
- 0678US4385954AMethod for applying binding agents to fibrous websJAMES RIVER DIXIE NORTHERN INC·Filed 1982·Granted May 31, 1983·39 cites·21 claims
- 0777US4348251ASystem for applying binding agents to fibrous websAMERICAN CAN CO·Filed 1980·Granted Sep 7, 1982·37 cites·5 claims
- 0876US12494343B2Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distanceCARL ZEISS MULTISEM GMBH·Filed 2023·Granted Dec 9, 2025·0 cites·21 claims
- 0972US12174546B2Method for measuring an effect of a wavelength-dependent measuring light reflectivity and an effect of a polarization of measuring light on a measuring light impingement on a lithography maskZEISS CARL SMT GMBH·Filed 2022·Granted Dec 24, 2024·0 cites·20 claims
- 1066US4292271AMethods of applying bonding materials onto fibrous websAMERICAN CAN CO·Filed 1979·Granted Sep 29, 1981·23 cites·33 claims
- 1165US2025343025A1Multi-beam particle microscope with improved multi-beam generator for field curvature correction and multi-beam generatorCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 1259US12422743B2Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the methodZEISS CARL SMT GMBH·Filed 2022·Granted Sep 23, 2025·0 cites·18 claims
- 1359US4202852AProcess for producing colored nonwoven fibrous websAMERICAN CAN CO·Filed 1978·Granted May 13, 1980·15 cites·3 claims
- 1458US9470872B2Reflective optical elementZEISS CARL SMT GMBH·Filed 2014·Granted Oct 18, 2016·1 cites·21 claims
- 1554US9709770B2Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Jul 18, 2017·0 cites·14 claims
- 1644US10551747B2Device for changing a surface shape of an optical element via electron irradiationZEISS CARL SMT GMBH·Filed 2018·Granted Feb 4, 2020·0 cites·20 claims
- 1742US10859819B2Method for changing a surface via particle irradiationZEISS CARL SMT GMBH·Filed 2019·Granted Dec 8, 2020·0 cites·20 claims
- 1833US2016161852A1Mirror for a microlithographic projection exposure system and method for processing a mirrorZEISS CARL SMT GMBH·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →