Inventor · disambiguated record
Wei Lu
Also filed as: LU WEI · LU WEI-MIN
12 granted patents·1 pending application·98 citations·filing 1998–2020
90Inventor score
Top patents by PatentIndex Score
13 records- 0198US11520321B2Measurement recipe optimization based on probabilistic domain knowledge and physical realizationKLA CORP·Filed 2020·Granted Dec 6, 2022·9 cites·20 claims
- 0296US10365225B1Multi-location metrologyKLA TENCOR CORP·Filed 2016·Granted Jul 30, 2019·20 cites·19 claims
- 0392US10210606B2Signal response metrology for image based and scatterometry overlay measurementsKLA TENCOR CORP·Filed 2015·Granted Feb 19, 2019·11 cites·18 claims
- 0487US11313809B1Process control metrologyKLA TENCOR CORP·Filed 2017·Granted Apr 26, 2022·5 cites·19 claims
- 0586US10139352B2Measurement of small box size targetsKLA TENCOR CORP·Filed 2015·Granted Nov 27, 2018·3 cites·20 claims
- 0679US7180061B2Method for electron beam-initiated coating for application of transmission electron microscopyIBM·Filed 2004·Granted Feb 20, 2007·17 cites·16 claims
- 0774US10732516B2Process robust overlay metrology based on optical scatterometryKLA TENCOR CORP·Filed 2018·Granted Aug 4, 2020·2 cites·32 claims
- 0872US6683305B1Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beamIBM·Filed 2002·Granted Jan 27, 2004·11 cites·14 claims
- 0970US6881955B2Metrology process for enhancing image contrastIBM·Filed 2003·Granted Apr 19, 2005·10 cites·20 claims
- 1051US7094616B2High resolution cross-sectioning of polysilicon features with a dual beam toolIBM·Filed 2004·Granted Aug 22, 2006·3 cites·16 claims
- 1143US7997002B2Dual carbon nanotubes for critical dimension metrology on high aspect ratio semiconductor wafer patternsIBM·Filed 2007·Granted Aug 16, 2011·0 cites·14 claims
- 1241US2020380407A1Generalized nonlinear mixed effect models via gaussian processesMICROSOFT TECHNOLOGY LICENSING LLC·Filed 2019·Application pending·0 cites
- 1336US6456450B1Method and apparatus for reducing track misregistration due to digital-to-analog converter quantization noiseIBM·Filed 1998·Granted Sep 24, 2002·7 cites·51 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →