Inventor · disambiguated record
William A. Mcgahan
Also filed as: MCGAHAN WILLIAM · MCGAHAN WILLIAM A
9 granted patents·2 pending applications·302 citations·filing 1999–2024
90Inventor score
Top patents by PatentIndex Score
11 records- 0196US7372565B1Spectrometer measurement of diffracting structuresNANOMETRICS INC·Filed 2006·Granted May 13, 2008·46 cites·24 claims
- 0292US7115858B1Apparatus and method for the measurement of diffracting structuresNANOMETRICS INC·Filed 2000·Granted Oct 3, 2006·55 cites·16 claims
- 0391US6898537B1Measurement of diffracting structures using one-half of the non-zero diffracted ordersNANOMETRICS INC·Filed 2001·Granted May 24, 2005·59 cites·46 claims
- 0489US8525993B2Scatterometry measurement of asymmetric structuresRABELLO SILVIO J·Filed 2010·Granted Sep 3, 2013·16 cites·52 claims
- 0586US6381009B1Elemental concentration measuring methods and instrumentsNANOMETRICS INC·Filed 1999·Granted Apr 30, 2002·92 cites·21 claims
- 0670US6836690B1High precision substrate prealignerNANOMETRICS INC·Filed 2002·Granted Dec 28, 2004·20 cites·47 claims
- 0765US7202958B1Modeling a sample with an underlying complicated structureNANOMETRICS INC·Filed 2004·Granted Apr 10, 2007·12 cites·27 claims
- 0863US2025164411A1Methods And Systems For Spectral Measurements Based On Perturbed SpectraKLA CORP·Filed 2024·Application pending·0 cites
- 0960US8170838B2Simulating two-dimensional periodic patterns using compressed fourier spaceRABELLO SILVIO J·Filed 2009·Granted May 1, 2012·2 cites·34 claims
- 1058US12449386B2Forward library based seeding for efficient X-ray scatterometry measurementsKLA CORP·Filed 2023·Granted Oct 21, 2025·0 cites·20 claims
- 1155US2023109008A1Spectroscopic Reflectometry And Ellipsometry Measurements With Electroreflectance ModulationKLA CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →