Inventor · disambiguated record
Xing Chen
Also filed as: CHEN XING · CHEN XING-YI
55 granted patents·19 pending applications·3,340 citations·filing 1995–2024
99Inventor score
Top patents by PatentIndex Score
74 records- 0198US6559408B2Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2002·Granted May 6, 2003·104 cites·15 claims
- 0298US6150628AToroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 1997·Granted Nov 21, 2000·458 cites·44 claims
- 0397US6815633B1Inductively-coupled toroidal plasma sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Nov 9, 2004·207 cites·64 claims
- 0497US6388226B1Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2000·Granted May 14, 2002·117 cites·36 claims
- 0596US6924455B1Integrated plasma chamber and inductively-coupled toroidal plasma sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Aug 2, 2005·82 cites·51 claims
- 0696US6486431B1Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2000·Granted Nov 26, 2002·56 cites·51 claims
- 0795US7161112B2Toroidal low-field reactive gas sourceMKS INSTR INC·Filed 2003·Granted Jan 9, 2007·45 cites·11 claims
- 0895US6872909B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselAPPLIED SCIENCE & TECH INC·Filed 2003·Granted Mar 29, 2005·55 cites·10 claims
- 0995US6552296B2Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Apr 22, 2003·62 cites·20 claims
- 1095US6268916B1System for non-destructive measurement of samplesKLA TENCOR CORP·Filed 1999·Granted Jul 31, 2001·174 cites·69 claims
- 1195US5910842AFocused beam spectroscopic ellipsometry method and systemKLA TENCOR CORP·Filed 1996·Granted Jun 8, 1999·196 cites·18 claims
- 1295US5608526AFocused beam spectroscopic ellipsometry method and systemTENCOR INSTRUMENTS·Filed 1995·Granted Mar 4, 1997·745 cites·72 claims
- 1394US10567154B1Ring oscillator based all-digital Bluetooth low energy transmitterUNIV MICHIGAN REGENTS·Filed 2018·Granted Feb 18, 2020·14 cites·20 claims
- 1494US8003935B2Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometerMKS INSTR INC·Filed 2007·Granted Aug 23, 2011·41 cites·21 claims
- 1593US8704171B2Chemical ionization reaction or proton transfer reaction mass spectrometryMKS INSTR INC·Filed 2012·Granted Apr 22, 2014·13 cites·11 claims
- 1693US8334505B2Chemical ionization reaction or proton transfer reaction mass spectrometryROBINSON TIMOTHY ROGER·Filed 2008·Granted Dec 18, 2012·44 cites·6 claims
- 1793US7569790B2Method and apparatus for processing metal bearing gasesMKS INSTR INC·Filed 2005·Granted Aug 4, 2009·19 cites·6 claims
- 1893US7501600B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselMKS INSTR INC·Filed 2005·Granted Mar 10, 2009·17 cites·25 claims
- 1992US8779322B2Method and apparatus for processing metal bearing gasesHOLBER WILLIAM M·Filed 2011·Granted Jul 15, 2014·19 cites·10 claims
- 2092US5771094AFilm measurement system with improved calibrationKLA TENCOR CORP·Filed 1997·Granted Jun 23, 1998·180 cites·25 claims
- 2192US5581350AMethod and system for calibrating an ellipsometerTENCOR INSTRUMENTS·Filed 1995·Granted Dec 3, 1996·162 cites·20 claims
- 2291US7969096B2Inductively-coupled plasma sourceMKS INSTR INC·Filed 2006·Granted Jun 28, 2011·59 cites·59 claims
- 2391US6664497B2Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2002·Granted Dec 16, 2003·26 cites·49 claims
- 2490US7659489B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselMKS INSTR INC·Filed 2007·Granted Feb 9, 2010·13 cites·34 claims
- 2590US7541558B2Inductively-coupled toroidal plasma sourceMKS INSTR INC·Filed 2006·Granted Jun 2, 2009·34 cites·26 claims
- 2690US6734967B1Focused beam spectroscopic ellipsometry method and systemKLA TENCOR TECH CORP·Filed 1999·Granted May 11, 2004·136 cites·32 claims
- 2788US9275839B2Toroidal plasma chamber for high gas flow rate processCHEN XING·Filed 2007·Granted Mar 1, 2016·13 cites·13 claims
- 2888US8124906B2Method and apparatus for processing metal bearing gasesHOLBER WILLIAM M·Filed 2009·Granted Feb 28, 2012·30 cites·19 claims
- 2988US7166816B1Inductively-coupled torodial plasma sourceMKS INSTR INC·Filed 2004·Granted Jan 23, 2007·56 cites·18 claims
- 3087US10067349B2Method of adapting a virtual reality helmetBEIJING PICO TECH CO LTD·Filed 2016·Granted Sep 4, 2018·5 cites·16 claims
- 3186US9865426B2Compact, configurable power supply for energizing ozone-producing cellsMKS INSTR INC·Filed 2016·Granted Jan 9, 2018·5 cites·8 claims
- 3286US9302912B2Compact, configurable power supply for energizing ozone-producing cellsTRAN KEN·Filed 2012·Granted Apr 5, 2016·5 cites·26 claims
- 3385US10940635B2Method and apparatus for processing dielectric materials using microwave energyMKS INSTR INC·Filed 2018·Granted Mar 9, 2021·2 cites·19 claims
- 3485USD890406SRotating projection night lightSHENZHEN KANGQIAN TECH CO LTD·Filed 2018·Granted Jul 14, 2020·30 cites·1 claims
- 3585US10071521B2Method and apparatus for processing dielectric materials using microwave energyMKS INSTR INC·Filed 2015·Granted Sep 11, 2018·2 cites·18 claims
- 3685US8003936B2Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometerMKS INSTR INC·Filed 2007·Granted Aug 23, 2011·9 cites·26 claims
- 3783US8888982B2Reduction of copper or trace metal contaminants in plasma electrolytic oxidation coatingsCHEN XING·Filed 2010·Granted Nov 18, 2014·4 cites·7 claims
- 3881US8053700B2Applicators and cooling systems for a plasma deviceMKS INSTR INC·Filed 2006·Granted Nov 8, 2011·6 cites·45 claims
- 3980US5792522AHigh density plasma physical vapor depositionINTEL CORP·Filed 1996·Granted Aug 11, 1998·65 cites·29 claims
- 4076US9653266B2Microwave plasma applicator with improved power uniformityMKS INSTR INC·Filed 2015·Granted May 16, 2017·3 cites·51 claims
- 4174US11019715B2Plasma source having a dielectric plasma chamber with improved plasma resistanceMKS INSTR INC·Filed 2018·Granted May 25, 2021·1 cites·27 claims
- 4272US8749939B2Method and system for shoot-through protectionTRAN KEN·Filed 2011·Granted Jun 10, 2014·4 cites·21 claims
- 4372US8692466B2Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generatorBENZERROUK SOUHEIL·Filed 2009·Granted Apr 8, 2014·3 cites·44 claims
- 4471USD923236SProjection night lightSHENZHEN KANGQIAN TECH CO LTD·Filed 2019·Granted Jun 22, 2021·13 cites·1 claims
- 4571US7914603B2Particle trap for a plasma sourceMKS INSTR INC·Filed 2008·Granted Mar 29, 2011·2 cites·56 claims
- 4669US12075554B2Plasma source having a dielectric plasma chamber with improved plasma resistanceMKS INSTR INC·Filed 2021·Granted Aug 27, 2024·0 cites·21 claims
- 4767US11733224B2Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of useMKS INSTR INC·Filed 2022·Granted Aug 22, 2023·0 cites·10 claims
- 4864US2018233333A1Toroidal plasma abatement apparatus and methodMKS INSTR INC·Filed 2018·Application pending·0 cites
- 4963US9991098B2Toroidal plasma abatement apparatus and methodMKS INSTR INC·Filed 2017·Granted Jun 5, 2018·0 cites·9 claims
- 5060US11262340B2Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of useMKS INSTR·Filed 2018·Granted Mar 1, 2022·0 cites·7 claims
Showing the top 50 of 74 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →