Inventor · disambiguated record
Yan Fang
Also filed as: FANG YAN · FANG YAN-LI
10 granted patents·6 pending applications·29 citations·filing 2007–2023
85Inventor score
Top patents by PatentIndex Score
16 records- 0183US8171877B2Backside mounted electrode carriers and assemblies incorporating the sameAUGUSTINO JASON·Filed 2008·Granted May 8, 2012·8 cites·20 claims
- 0282US8075701B2Processes for reconditioning multi-component electrodesAVOYAN ARMEN·Filed 2008·Granted Dec 13, 2011·7 cites·20 claims
- 0379US9105676B2Method of removing damaged epoxy from electrostatic chuckLAM RES CORP·Filed 2012·Granted Aug 11, 2015·5 cites·12 claims
- 0472US8276604B2Peripherally engaging electrode carriers and assemblies incorporating the sameAUGUSTINO JASON·Filed 2008·Granted Oct 2, 2012·4 cites·16 claims
- 0564US8545639B2Method of cleaning aluminum plasma chamber partsSHIH HONG·Filed 2011·Granted Oct 1, 2013·1 cites·19 claims
- 0664US8221552B2Cleaning of bonded silicon electrodesOUTKA DUANE·Filed 2007·Granted Jul 17, 2012·3 cites·20 claims
- 0763US8143904B2System and method for testing an electrostatic chuckSHIH HONG·Filed 2008·Granted Mar 27, 2012·1 cites·10 claims
- 0851US9387521B2Method of wet cleaning aluminum chamber partsLAM RES CORP·Filed 2013·Granted Jul 12, 2016·0 cites·20 claims
- 0951US9082805B2System and method for testing an electrostatic chuckSHIH HONG·Filed 2012·Granted Jul 14, 2015·0 cites·6 claims
- 1051US2024007022A1Piezoelectric motor, camera module, and electronic deviceHUAWEI TECH CO LTD·Filed 2023·Application pending·0 cites
- 1150US2014113453A1Tungsten carbide coated metal component of a plasma reactor chamber and method of coatingLAM RES CORP·Filed 2012·Application pending·0 cites
- 1250US2013160948A1Plasma Processing Devices With Corrosion Resistant ComponentsSHIH HONG·Filed 2012·Application pending·0 cites
- 1349US9241406B2Electronic assemblyAU OPTRONICS CORP·Filed 2013·Granted Jan 19, 2016·0 cites·9 claims
- 1447US2017040147A1Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying CoatingsLAM RES CORP·Filed 2016·Application pending·0 cites
- 1546US2013105083A1Systems Comprising Silicon Coated Gas Supply Conduits And Methods For Applying CoatingsSHIH HONG·Filed 2011·Application pending·0 cites
- 1642US2013102156A1Components of plasma processing chambers having textured plasma resistant coatingsLAM RES CORP·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →