Inventor · disambiguated record
Yasumasa Hiroo
Also filed as: HIROO YASUMASA
14 granted patents·2 pending applications·157 citations·filing 2000–2023
92Inventor score
Top patents by PatentIndex Score
16 records- 0198US7822500B2Polishing apparatus and polishing methodEBARA CORP·Filed 2005·Granted Oct 26, 2010·50 cites·27 claims
- 0294US7313452B2Substrate transfer controlling apparatus and substrate transferring methodEBARA CORP·Filed 2006·Granted Dec 25, 2007·23 cites·19 claims
- 0393US10828747B2Substrate polishing apparatus and methodEBARA CORP·Filed 2018·Granted Nov 10, 2020·5 cites·20 claims
- 0489US8246417B2Polishing apparatus and polishing methodKOBAYASHI YOICHI·Filed 2007·Granted Aug 21, 2012·16 cites·16 claims
- 0588US11458589B2Polishing apparatus and polishing member dressing methodEBARA CORP·Filed 2019·Granted Oct 4, 2022·2 cites·5 claims
- 0685US7072730B2Substrate transfer controlling apparatus and substrate transferring methodEBARA CORP·Filed 2004·Granted Jul 4, 2006·25 cites·19 claims
- 0782US8398456B2Polishing method, polishing apparatus and method of monitoring a substrateKOBAYASHI YOICHI·Filed 2010·Granted Mar 19, 2013·5 cites·12 claims
- 0881US8078419B2Polishing monitoring method and polishing apparatusKOBAYASHI YOICHI·Filed 2008·Granted Dec 13, 2011·8 cites·5 claims
- 0980US9437507B2Method of correcting film thickness measurement value, film thickness corrector and eddy current sensorEBARA CORP·Filed 2015·Granted Sep 6, 2016·3 cites·17 claims
- 1078US6772029B2Wafer transfer control apparatus and method for transferring waferEBARA CORP·Filed 2000·Granted Aug 3, 2004·17 cites·21 claims
- 1172US8112169B2Polishing apparatus and polishing methodKOBAYASHI YOICHI·Filed 2010·Granted Feb 7, 2012·2 cites·18 claims
- 1271US2024207996A1Substrate polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 1369US11945075B2Polishing apparatus and polishing member dressing methodEBARA CORP·Filed 2022·Granted Apr 2, 2024·0 cites·16 claims
- 1462US12420378B2Substrate processing apparatus and method for controlling dressing of polishing memberEBARA CORP·Filed 2021·Granted Sep 23, 2025·0 cites·8 claims
- 1562US9440327B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Sep 13, 2016·1 cites·10 claims
- 1651US2022176513A1Polishing method, polishing monitoring method and polishing monitoring apparatus for workpieceEBARA CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →