Inventor · disambiguated record
Yasuhisa Kudo
Also filed as: KUDO YASUHISA
4 granted patents·3 pending applications·58 citations·filing 2004–2025
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0185US10340174B2Mounting table and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jul 2, 2019·7 cites·16 claims
- 0284US7560376B2Method for adjoining adjacent coatings on a processing elementTOKYO ELECTRON LTD·Filed 2004·Granted Jul 14, 2009·42 cites·25 claims
- 0377US8057633B2Post-etch treatment system for removing residue on a substrateTSUKAMOTO YUJI·Filed 2006·Granted Nov 15, 2011·7 cites·28 claims
- 0473US10515786B2Mounting table and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Dec 24, 2019·2 cites·16 claims
- 0552US2023136720A1Substrate support, plasma processing apparatus, and plasma processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0651US2025174442A1Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0748US2023073711A1Substrate support assembly and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →