Inventor · disambiguated record
Yasuyuki Motoshima
Also filed as: MOTOSHIMA YASUYUKI
31 granted patents·12 pending applications·204 citations·filing 2003–2024
96Inventor score
Top patents by PatentIndex Score
43 records- 0199US9782870B2Polishing method and polishing apparatusEBARA CORP·Filed 2014·Granted Oct 10, 2017·34 cites·4 claims
- 0297US10035238B2Polishing method and polishing apparatusEBARA CORP·Filed 2017·Granted Jul 31, 2018·15 cites·5 claims
- 0396US9579768B2Method and apparatus for polishing a substrateMOTOSHIMA YASUYUKI·Filed 2012·Granted Feb 28, 2017·31 cites·43 claims
- 0495US10195712B2Polishing method and polishing apparatusEBARA CORP·Filed 2017·Granted Feb 5, 2019·4 cites·8 claims
- 0594US8845391B2Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatusSONE TADAKAZU·Filed 2010·Granted Sep 30, 2014·26 cites·21 claims
- 0693US10259098B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2018·Granted Apr 16, 2019·3 cites·11 claims
- 0793US9475167B2Polishing apparatus having temperature regulator for polishing padMARUYAMA TORU·Filed 2012·Granted Oct 25, 2016·20 cites·11 claims
- 0892US10710208B2Polishing method and polishing apparatusEBARA CORP·Filed 2018·Granted Jul 14, 2020·4 cites·9 claims
- 0990US10414018B2Apparatus and method for regulating surface temperature of polishing padEBARA CORP·Filed 2017·Granted Sep 17, 2019·4 cites·15 claims
- 1090US9969046B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2015·Granted May 15, 2018·3 cites·23 claims
- 1189US10099340B2Polishing apparatus including pad contact member with baffle in liquid flow path thereinEBARA CORP·Filed 2016·Granted Oct 16, 2018·3 cites·14 claims
- 1287US7442257B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2006·Granted Oct 28, 2008·9 cites·3 claims
- 1386US7575636B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2006·Granted Aug 18, 2009·8 cites·13 claims
- 1485US12257666B2Surface height measurement method using dummy diskEBARA CORP·Filed 2023·Granted Mar 25, 2025·0 cites·4 claims
- 1585US9233448B2Adjusting a substrate polishing conditionEBARA CORP·Filed 2013·Granted Jan 12, 2016·4 cites·14 claims
- 1685US7087117B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2003·Granted Aug 8, 2006·23 cites·5 claims
- 1783US8777198B2Substrate holding apparatus, substrate holding method, and substrate processing apparatusSEKIMOTO MASAHIKO·Filed 2012·Granted Jul 15, 2014·5 cites·9 claims
- 1879US11383345B2Cleaning apparatus for heat exchanger and polishing apparatusEBARA CORP·Filed 2020·Granted Jul 12, 2022·1 cites·19 claims
- 1979US2021229235A1Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatusEBARA CORP·Filed 2021·Application pending·0 cites
- 2073US10475691B2Substrate transfer handEBARA CORP·Filed 2016·Granted Nov 12, 2019·2 cites·14 claims
- 2172US2020246936A1Dummy disk, dressing disk, and surface height measurement method using dummy diskEBARA CORP·Filed 2019·Application pending·0 cites
- 2271US8141513B2Substrate holding apparatus, substrate holding method, and substrate processing apparatusSEKIMOTO MASAHIKO·Filed 2011·Granted Mar 27, 2012·2 cites·10 claims
- 2371US2019168354A1Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatusEBARA CORP·Filed 2019·Application pending·0 cites
- 2470US2023356267A1Cleaning member attaching part, cleaning member assembly and substrate cleaning apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 2570US2024033876A1Polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 2669US11094548B2Apparatus for cleaning substrate and substrate cleaning methodEBARA CORP·Filed 2017·Granted Aug 17, 2021·1 cites·21 claims
- 2768US2024351163A1Polishing method, polishing apparatus, and computer-readable storage medium storing temperature regulation programEBARA CORP·Filed 2024·Application pending·0 cites
- 2866US11839947B2Pad-temperature regulating apparatus, and polishing apparatusEBARA CORP·Filed 2022·Granted Dec 12, 2023·0 cites·8 claims
- 2963US9561575B2Adjusting a substrate polishing conditionEBARA CORP·Filed 2015·Granted Feb 7, 2017·0 cites·11 claims
- 3063US2022347814A1Polishing apparatus and polishing methodEBARA CORP·Filed 2022·Application pending·0 cites
- 3161US2014364040A1Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatusEBARA CORP·Filed 2014·Application pending·0 cites
- 3260US11897080B2Polishing apparatusEBARA CORP·Filed 2020·Granted Feb 13, 2024·0 cites·13 claims
- 3357US12472601B2Method of checking leakage of fluid and polishing apparatusEBARA CORP·Filed 2019·Granted Nov 18, 2025·0 cites·7 claims
- 3457US2020276619A1Cleaning member attaching part, cleaning member assembly and substrate cleaning apparatusEBARA CORP·Filed 2020·Application pending·0 cites
- 3554US12023777B2Temperature regulating apparatus and polishing apparatusEBARA CORP·Filed 2020·Granted Jul 2, 2024·0 cites·11 claims
- 3651US12181345B2Method of calibrating radiation thermometer and system thereofEBARA CORP·Filed 2020·Granted Dec 31, 2024·0 cites·16 claims
- 3751US11517940B2Substrate cleaning deviceEBARA CORP·Filed 2019·Granted Dec 6, 2022·0 cites·8 claims
- 3851US7886685B2Substrate holding apparatus, substrate holding method, and substrate processing apparatusEBARA CORP·Filed 2004·Granted Feb 15, 2011·2 cites·2 claims
- 3951US2006243204A1Substrate processing apparatus and substrate processing methodKATSUOKA SEIJI·Filed 2006·Application pending·0 cites
- 4051US2019193237A1Pad temperature adjustment apparatus for adjusting temperature of polishing pad, and polishing apparatusEBARA CORP·Filed 2018·Application pending·0 cites
- 4147US11577357B2Temperature adjusting device and polishing deviceEBARA CORP·Filed 2019·Granted Feb 14, 2023·0 cites·14 claims
- 4245US11958161B2Polishing apparatus having surface-property measuring device of polishing pad and polishing systemEBARA CORP·Filed 2019·Granted Apr 16, 2024·0 cites·4 claims
- 4339US2019126428A1Heat exchanger for regulating temperature of polishing surface of polishing pad, polishing apparatus having such heat exchanger, polishing method for substrate using such heat exchanger, and computer-readable storage medium storing a program for regulating temperature of polishing surface of polishing padEBARA CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →