Inventor · disambiguated record
Yasunari Souda
Also filed as: SOUDA YASUNARI
5 granted patents·33 citations·filing 2003–2010
78Inventor score
Top patents by PatentIndex Score
5 records- 0184US8217351B2Pattern inspection method and pattern inspection systemTOYODA YASUTAKA·Filed 2010·Granted Jul 10, 2012·6 cites·6 claims
- 0284US7126140B2Multi-electron beam exposure method and apparatusADVANTEST CORP·Filed 2005·Granted Oct 24, 2006·7 cites·9 claims
- 0383US7786437B2Pattern inspection method and pattern inspection systemHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 31, 2010·7 cites·20 claims
- 0479US7067830B2Multi-electron beam exposure method and apparatusADVANTEST CORP·Filed 2003·Granted Jun 27, 2006·13 cites·9 claims
- 0551US8026482B2Charged particle beam apparatus and control method thereforHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 27, 2011·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →