Inventor · disambiguated record
Yaobo Yin
Also filed as: YIN YAOBO
5 granted patents·1 pending application·37 citations·filing 2006–2013
79Inventor score
Top patents by PatentIndex Score
6 records- 0187US7942973B2Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatusesLAM RES CORP·Filed 2006·Granted May 17, 2011·9 cites·12 claims
- 0286US8327861B2Megasonic precision cleaning of semiconductor process equipment components and partsYIN YAOBO·Filed 2006·Granted Dec 11, 2012·15 cites·15 claims
- 0382US7578889B2Methodology for cleaning of surface metal contamination from electrode assembliesLAM RES CORP·Filed 2007·Granted Aug 25, 2009·9 cites·18 claims
- 0481US8215321B2Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatusesSHIH HONG·Filed 2011·Granted Jul 10, 2012·3 cites·18 claims
- 0561US8607806B2Megasonic precision cleaning of semiconductor process equipment components and partsYIN YAOBO·Filed 2012·Granted Dec 17, 2013·1 cites·10 claims
- 0651US2014053884A1Megasonic Precision Cleaning Of Semiconductor Process Equipment Components And PartsLAM RES CORP·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →