Inventor · disambiguated record
Yongyong He
Also filed as: HE YONGYONG
3 granted patents·4 pending applications·8 citations·filing 2011–2011
55Inventor score
Top patents by PatentIndex Score
7 records- 0178US9138857B2Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the sameLU XINCHUN·Filed 2011·Granted Sep 22, 2015·8 cites·14 claims
- 0238US9255780B2Method for measuring thickness of film on wafer edgeLU XINCHUN·Filed 2011·Granted Feb 9, 2016·0 cites·12 claims
- 0337US9377286B2Device for globally measuring thickness of metal filmLU XINCHUN·Filed 2011·Granted Jun 28, 2016·0 cites·5 claims
- 0434US2012115403A1Pad conditioner head for conditioning a polishing padLU XINCHUN·Filed 2011·Application pending·0 cites
- 0534US2012315826A1Device and Method for Measuring Physical Parameters of Slurry and Chemical Mechanical Polishing Apparatus Comprising the DeviceLU XINCHUN·Filed 2011·Application pending·0 cites
- 0632US2013000845A1Device and Method for Measuring Thickness of Slurry and Chemical Mechanical Polishing Apparatus Comprising the DeviceUNIV TSINGHUA·Filed 2011·Application pending·0 cites
- 0728US2013273819A1Wafer transfer device for chemical mechanical polishing apparatusLU XINCHUN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →