Inventor · disambiguated record
Youfei Jiang
Also filed as: JIANG YOUFEI
11 granted patents·5 pending applications·4 citations·filing 2018–2024
80Inventor score
Top patents by PatentIndex Score
16 records- 0187US12165831B2Method and system of image-forming multi-electron beamsKLA CORP·Filed 2022·Granted Dec 10, 2024·1 cites·22 claims
- 0282US11152191B2In-lens wafer pre-charging and inspection with multiple beamsASML NETHERLANDS BV·Filed 2019·Granted Oct 19, 2021·3 cites·16 claims
- 0381US12191109B2Sample pre-charging methods and apparatuses for charged particle beam inspectionASML NETHERLANDS BV·Filed 2023·Granted Jan 7, 2025·0 cites·19 claims
- 0471US12165837B2System and method for scanning a sample using multi-beam inspection apparatusASML NETHERLANDS BV·Filed 2022·Granted Dec 10, 2024·0 cites·13 claims
- 0567US12374524B2In-lens wafer PE-charging and inspection with multiple beamsASML NETHERLANDS BV·Filed 2021·Granted Jul 29, 2025·0 cites·16 claims
- 0662US12283453B2Creating multiple electron beams with a photocathode filmKLA CORP·Filed 2022·Granted Apr 22, 2025·0 cites·28 claims
- 0762US12068129B2Tilt-column multi-beam electron microscopy system and methodKLA CORP·Filed 2022·Granted Aug 20, 2024·0 cites·29 claims
- 0861US11676792B2Sample pre-charging methods and apparatuses for charged particle beam inspectionASML NETHERLANDS BV·Filed 2018·Granted Jun 13, 2023·0 cites·16 claims
- 0961US2025357066A1Electron beam metrology having a source energy spread with filtered tailsKLA CORP·Filed 2024·Application pending·0 cites
- 1059US2025112017A1Imaging thousands of electron beams during workpiece inspectionKLA CORP·Filed 2023·Application pending·0 cites
- 1158US12451319B2Electron source with magnetic suppressor electrodeKLA CORP·Filed 2020·Granted Oct 21, 2025·0 cites·12 claims
- 1258US11469076B2System and method for scanning a sample using multi-beam inspection apparatusASML NETHERLANDS BV·Filed 2019·Granted Oct 11, 2022·0 cites·15 claims
- 1358US2025062098A1System and method for dynamic aberration correctionKLA CORP·Filed 2024·Application pending·0 cites
- 1457US2025273424A1Use of multiple electron beams for high throughput inspectionKLA CORP·Filed 2024·Application pending·0 cites
- 1554US11749495B2Bandpass charged particle energy filtering detector for charged particle toolsKLA CORP·Filed 2021·Granted Sep 5, 2023·0 cites·35 claims
- 1649US2023245933A1Combining focused ion beam milling and scanning electron microscope imagingKLA CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →