Inventor · disambiguated record
Yosuke Kawabuchi
Also filed as: KAWABUCHI YOSUKE
14 granted patents·5 pending applications·26 citations·filing 2010–2022
87Inventor score
Top patents by PatentIndex Score
19 records- 0186US10504718B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 10, 2019·5 cites·10 claims
- 0285US10395950B2Substrate processing apparatus, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Aug 27, 2019·5 cites·10 claims
- 0382US8475668B2Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored thereinTANAKA HIROSHI·Filed 2010·Granted Jul 2, 2013·6 cites·6 claims
- 0480US10950465B2Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 16, 2021·3 cites·7 claims
- 0576US10692739B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jun 23, 2020·2 cites·8 claims
- 0676US9362106B2Substrate processing method, substrate processing apparatus, and storage mediumSONY CORP·Filed 2013·Granted Jun 7, 2016·4 cites·8 claims
- 0767US10727042B2Liquid processing method, substrate processing apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Jul 28, 2020·1 cites·9 claims
- 0853US9805957B2Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing programTOKYO ELECTRON LTD·Filed 2014·Granted Oct 31, 2017·0 cites·11 claims
- 0951US10192758B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jan 29, 2019·0 cites·9 claims
- 1048US11854815B2Substrate drying apparatus, substrate drying method and storage mediumTOKYO ELECTRON LTD·Filed 2019·Granted Dec 26, 2023·0 cites·15 claims
- 1148US2024429068A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1244US2020126818A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1342US9321085B2Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Apr 26, 2016·0 cites·7 claims
- 1440US2019164785A1Substrate Processing Method and Substrate Processing ApparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1537US10867814B2Liquid processing method, substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 15, 2020·0 cites·17 claims
- 1637US2018138058A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1736US8906165B2Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatusMINAMI TERUOMI·Filed 2011·Granted Dec 9, 2014·0 cites·8 claims
- 1836US2018240684A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 1935US8545640B2Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatusMINAMI TERUOMI·Filed 2011·Granted Oct 1, 2013·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →