Inventor · disambiguated record
Yoshinobu Ohya
Also filed as: OHYA YOSHINOBU
6 granted patents·1 pending application·86 citations·filing 2011–2020
81Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0197US8603293B2Plasma processing apparatus and methodKOSHIISHI AKIRA·Filed 2011·Granted Dec 10, 2013·73 cites·22 claims
- 0289US9490105B2Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2013·Granted Nov 8, 2016·6 cites·19 claims
- 0387US10854431B2Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2019·Granted Dec 1, 2020·2 cites·12 claims
- 0483US10546727B2Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2016·Granted Jan 28, 2020·2 cites·9 claims
- 0580US10600654B2Etching process methodTOKYO ELECTRON LTD·Filed 2017·Granted Mar 24, 2020·3 cites·7 claims
- 0674US2021082669A1Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0744US11075062B2Vacuum processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jul 27, 2021·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →