Inventor · disambiguated record
Yoshiaki Sasaki
Also filed as: SASAKI YOSHIAKI
15 granted patents·7 pending applications·809 citations·filing 1983–2024
93Inventor score
Top patents by PatentIndex Score
22 records- 0197US6224679B1Controlling gas in a multichamber processing systemTOKYO ELECTRON LTD·Filed 1998·Granted May 1, 2001·375 cites·4 claims
- 0296US6328864B1Vacuum processing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Dec 11, 2001·304 cites·6 claims
- 0384US7279067B2Port structure in semiconductor processing systemTOKYO ELECTRON LTD·Filed 2003·Granted Oct 9, 2007·33 cites·12 claims
- 0484US6742980B2Method for aligning conveying position of object processing system, and object processing systemTOKYO ELECTRON LTD·Filed 2001·Granted Jun 1, 2004·35 cites·7 claims
- 0581US6984097B1Mounting/demounting device for wafer carrier lidTOKYO ELECTRON LTD·Filed 2000·Granted Jan 10, 2006·29 cites·8 claims
- 0669US10720356B2Substrate processing apparatus and method of transferring substrateTOKYO ELECTRON LTD·Filed 2017·Granted Jul 21, 2020·1 cites·6 claims
- 0768US6676356B2Device for attaching target substrate transfer container to semiconductor processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Jan 13, 2004·12 cites·14 claims
- 0860US2024153852A1Semiconductor device and ignition deviceROHM CO LTD·Filed 2024·Application pending·0 cites
- 0954US7697745B2Enclosure inspection method and apparatus thereofRIKEN·Filed 2006·Granted Apr 13, 2010·3 cites·8 claims
- 1053US2021275575A1Composition for improving renal function in renal diseases containing molecular hydrogenMIZ COMPANY LTD·Filed 2021·Application pending·0 cites
- 1152US6579056B2Cart for mounting/demounting wafer transfer robotTOKYO ELECTRON LTD·Filed 2001·Granted Jun 17, 2003·6 cites·12 claims
- 1249US11856655B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Dec 26, 2023·0 cites·8 claims
- 1347US2010326637A1Load-lock apparatus and substrate cooling methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1444US12000699B2Optical interference measuring apparatus and optical interference measuring methodTOPCON CORP·Filed 2020·Granted Jun 4, 2024·0 cites·5 claims
- 1543US2022221266A1Optical interference measuring apparatus and optical interference measuring methodTOPCON CORP·Filed 2020·Application pending·0 cites
- 1642US4482382APouring repair material for mortar or the like wallNIPPON KOKAN KK·Filed 1983·Granted Nov 13, 1984·11 cites·9 claims
- 1742US2019096702A1Substrate processing apparatus, substrate processing method, and computer storage mediumTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1838US8318238B2Film position adjusting method, memory medium and substrate processing systemSASAKI YOSHIAKI·Filed 2007·Granted Nov 27, 2012·0 cites·11 claims
- 1936US2002006323A1Semiconductor processing system and transfer apparatus for the sameFiled 2001·Application pending·0 cites
- 2033US9541920B2Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unitTOKYO ELECTRON LTD·Filed 2013·Granted Jan 10, 2017·0 cites·12 claims
- 2132US10256128B2Cooling mechanism and processing systemTOKYO ELECTRON LTD·Filed 2013·Granted Apr 9, 2019·0 cites·12 claims
- 2228US2016169766A1Leakage determining method, substrate processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →