Inventor · disambiguated record
Yoshio Susa
Also filed as: SUSA YOSHIO
15 granted patents·12 pending applications·438 citations·filing 2013–2025
89Inventor score
Top patents by PatentIndex Score
27 records- 0196US10290508B1Method for forming vertical spacers for spacer-defined patterningASM IP HOLDING BV·Filed 2017·Granted May 14, 2019·414 cites·16 claims
- 0293US10844484B2Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methodsASM IP HOLDING BV·Filed 2018·Granted Nov 24, 2020·10 cites·11 claims
- 0393US10755922B2Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted depositionASM IP HOLDING BV·Filed 2019·Granted Aug 25, 2020·8 cites·19 claims
- 0487US12125700B2Method of forming high aspect ratio featuresASM IP HOLDING BV·Filed 2021·Granted Oct 22, 2024·2 cites·23 claims
- 0583US11646197B2Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted depositionASM IP HOLDING BV·Filed 2020·Granted May 9, 2023·1 cites·16 claims
- 0683US11626316B2Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structureASM IP HOLDING BV·Filed 2020·Granted Apr 11, 2023·1 cites·22 claims
- 0772US10629415B2Substrate processing apparatus and method for processing substrateASM IP HOLDING BV·Filed 2018·Granted Apr 21, 2020·1 cites·6 claims
- 0869US2025236952A1Method of forming a structure including carbon material, structure formed using the method, and system for forming the structureASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0968US12506000B2Method of filling gap with flowable carbon layerASM IP HOLDING BV·Filed 2022·Granted Dec 23, 2025·0 cites·21 claims
- 1065US2022406625A1Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methodsASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 1164US11348766B2Substrate processing apparatusASM IP HOLDING BV·Filed 2020·Granted May 31, 2022·0 cites·5 claims
- 1263US9659754B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2013·Granted May 23, 2017·1 cites·11 claims
- 1359US2025037994A1Methods of filling trenches on substrate surfaceASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1459US2024271280A1Method of forming dielectric material layer using plasmaASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1559US2024304441A1Method of forming dielectric material layer using plasmaASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1657US2021238742A1Method of forming a structure including carbon material, structure formed using the method, and system for forming the structureASM IP HOLDING BV·Filed 2021·Application pending·0 cites
- 1755US11705333B2Structures including multiple carbon layers and methods of forming and using sameASM IP HOLDING BV·Filed 2021·Granted Jul 18, 2023·0 cites·23 claims
- 1855US2024043990A1Method for forming layer on different-density pattern regionsASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 1953US12385131B2Method of forming a structure including a silicon carbide layerASM IP HOLDING BV·Filed 2022·Granted Aug 12, 2025·0 cites·13 claims
- 2053US12040177B2Methods for forming a laminate film by cyclical plasma-enhanced deposition processesASM IP HOLDING BV·Filed 2021·Granted Jul 16, 2024·0 cites·20 claims
- 2153US2023129291A1Bevel etcher using atmospheric plasmaASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 2252US11430674B2Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methodsASM IP HOLDING BV·Filed 2018·Granted Aug 30, 2022·0 cites·12 claims
- 2351US2023137026A1Method and system for selectively removing material at an edge of a substrateASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 2450US2022251707A1Methods of filling recesses on substrate surface, structures formed using the methods, and systems for forming sameASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 2549US2022178023A1Method of forming a structure including silicon-carbon material, structure formed using the method, and system for forming the structureASM IP HOLDING BV·Filed 2021·Application pending·0 cites
- 2644US10707073B2Film forming method and patterning methodASM IP HOLDING BV·Filed 2017·Granted Jul 7, 2020·0 cites·13 claims
- 2735US2018282869A1Shower plate, substrate processing apparatus and method for processing substrateASM IP HOLDING BV·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →