Inventor · disambiguated record
Yu Chang
Also filed as: CHANG YU · CHANG YU-SHUN
13 granted patents·9 pending applications·70 citations·filing 1989–2024
88Inventor score
Files withAPPLIED MATERIALS INC9CHANG YU SHUN5CUVALCI OLKAN1GELATOS AVGERINOS V1HEWLETT PACKARD ENTPR DEV LP1
Top patents by PatentIndex Score
22 records- 0191US9490150B2Substrate support for substrate backside contamination controlTZU GWO-CHUAN·Filed 2012·Granted Nov 8, 2016·17 cites·18 claims
- 0289US10407771B2Atomic layer deposition chamber with thermal lidAPPLIED MATERIALS INC·Filed 2014·Granted Sep 10, 2019·12 cites·18 claims
- 0382USD326873SToy novelty flying saucerCHANG YU-SHUN·Filed 1989·Granted Jun 9, 1992·23 cites·1 claims
- 0479US10704142B2Quick disconnect resistance temperature detector assembly for rotating pedestalAPPLIED MATERIALS INC·Filed 2017·Granted Jul 7, 2020·2 cites·20 claims
- 0570US8821637B2Temperature controlled lid assembly for tungsten nitride depositionGELATOS AVGERINOS V·Filed 2008·Granted Sep 2, 2014·3 cites·14 claims
- 0661US12372101B1Fan mounting systemHEWLETT PACKARD ENTPR DEV LP·Filed 2024·Granted Jul 29, 2025·0 cites·16 claims
- 0761US2014076234A1Multi chamber processing systemAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 0861US2009111280A1Method for removing oxidesAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 0954US9202674B2Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elementsCUVALCI OLKAN·Filed 2008·Granted Dec 1, 2015·0 cites·9 claims
- 1053US5848029AMotion liquid display toyFiled 1996·Granted Dec 8, 1998·12 cites·17 claims
- 1153US2005230350A1In-situ dry clean chamber for front end of line fabricationAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1250US11598003B2Substrate processing chamber having heated showerhead assemblyAPPLIED MATERIALS INC·Filed 2017·Granted Mar 7, 2023·0 cites·7 claims
- 1350US8858122B2Method and structure for reinforcing ecological greening fabricCHANG YU-SHUN·Filed 2011·Granted Oct 14, 2014·0 cites·15 claims
- 1444US2018073147A1Remote plasma generator of remote plasma-enhanced chemical vapor deposition (pecvd) systemCHANG YU SHUN·Filed 2017·Application pending·0 cites
- 1543US10134615B2Substrate support with improved RF returnAPPLIED MATERIALS INC·Filed 2016·Granted Nov 20, 2018·0 cites·18 claims
- 1643US2014137961A1Modular chemical delivery systemAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1740US11495932B2Slip ring for use in rotatable substrate supportAPPLIED MATERIALS INC·Filed 2018·Granted Nov 8, 2022·0 cites·20 claims
- 1837US2014209766A1Retaining apparatus for expansion cardsHON HAI PREC IND CO LTD·Filed 2013·Application pending·0 cites
- 1936US2014164678A1Intelligent detection device of solid state hard disk combining a plurality of nand flash memory cards and detecting method for the sameKEY TECHNOLOGY CORP·Filed 2012·Application pending·0 cites
- 2034US2018073145A1Auxiliary device for plasma-enhanced chemical vapor deposition (pecvd) reaction chamber and film deposition method using the sameCHANG YU SHUN·Filed 2017·Application pending·0 cites
- 2131USD329474SToy time tunnel or similar articleCHANG YU-SHUN·Filed 1989·Granted Sep 15, 1992·1 cites·1 claims
- 2231US2012198127A1Composite solid state drive control systemLAN CHIEN HUNG·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →