Inventor · disambiguated record
Yusei Kuwabara
Also filed as: KUWABARA YUSEI
7 granted patents·3 pending applications·526 citations·filing 2012–2022
85Inventor score
Top patents by PatentIndex Score
10 records- 0196USD709537SFocusing ringKUWABARA YUSEI·Filed 2012·Granted Jul 22, 2014·447 cites·1 claims
- 0290US11705346B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jul 18, 2023·2 cites·12 claims
- 0387USD709539SFocusing ringKUWABARA YUSEI·Filed 2012·Granted Jul 22, 2014·40 cites·1 claims
- 0486US9425028B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Aug 23, 2016·10 cites·6 claims
- 0579USD699199SElectrode plate for a plasma processing apparatusKUWABARA YUSEI·Filed 2012·Granted Feb 11, 2014·27 cites·1 claims
- 0653US11869753B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jan 9, 2024·0 cites·7 claims
- 0748US2022301832A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0847US2021159058A1Thermal conductive member, plasma processing apparatus, and voltage control methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0946US2021305022A1Edge ring, substrate support, plasma processing system and method of replacing edge ringTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1038US10304666B2Plasma processing apparatus having a baffle plate and a rectifying plateTOKYO ELECTRON LTD·Filed 2016·Granted May 28, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →