Inventor · disambiguated record
Yuval Lubashevsky
Also filed as: LUBASHEVSKY YUVAL
14 granted patents·12 pending applications·60 citations·filing 2016–2024
89Inventor score
Top patents by PatentIndex Score
26 records- 0197US10197389B2Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fieldsKLA TENCOR CORP·Filed 2016·Granted Feb 5, 2019·19 cites·23 claims
- 0296US11796925B2Scanning overlay metrology using overlay targets having multiple spatial frequenciesKLA CORP·Filed 2022·Granted Oct 24, 2023·6 cites·22 claims
- 0396US10048132B2Simultaneous capturing of overlay signals from multiple targetsKLA TENCOR CORP·Filed 2016·Granted Aug 14, 2018·10 cites·17 claims
- 0495US10824079B2Diffraction based overlay scatterometryKLA TENCOR CORP·Filed 2018·Granted Nov 3, 2020·12 cites·16 claims
- 0595US10401228B2Simultaneous capturing of overlay signals from multiple targetsKLA TENCOR CORP·Filed 2018·Granted Sep 3, 2019·6 cites·23 claims
- 0687US11409205B2Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devicesKLA CORP·Filed 2020·Granted Aug 9, 2022·2 cites·22 claims
- 0781US10579768B2Process compatibility improvement by fill factor modulationKLA TENCOR CORP·Filed 2016·Granted Mar 3, 2020·3 cites·5 claims
- 0877US2024337953A1System and method for tracking real-time position for scanning overlay metrologyKLA CORP·Filed 2023·Application pending·0 cites
- 0974US11112704B2Mitigation of inaccuracies related to grating asymmetries in scatterometry measurementsKLA TENCOR CORP·Filed 2017·Granted Sep 7, 2021·2 cites·7 claims
- 1072US2024337952A1System and method for determining overlay measurement of a scanning targetKLA CORP·Filed 2023·Application pending·0 cites
- 1166US2024337606A1Parallel scanning overlay metrology with optical meta-surfacesKLA CORP·Filed 2024·Application pending·0 cites
- 1265US2025297955A1Scanning diffraction based overlay scatterometryKLA CORP·Filed 2024·Application pending·0 cites
- 1363US12373936B2System and method for overlay metrology using a phase maskKLA CORP·Filed 2023·Granted Jul 29, 2025·0 cites·38 claims
- 1463US2025306477A1Single grab pupil landscape via outside the objective lens broadband illuminationKLA CORP·Filed 2024·Application pending·0 cites
- 1562US2025328087A1System and method for determining overlay measurement of a scanning target using multiple wavelengthsKLA CORP·Filed 2024·Application pending·0 cites
- 1660US12504697B2Single grab pupil landscape via broadband illuminationKLA CORP·Filed 2023·Granted Dec 23, 2025·0 cites·20 claims
- 1758US12487190B2System and method for isolation of specific fourier pupil frequency in overlay metrologyKLA CORP·Filed 2022·Granted Dec 2, 2025·0 cites·26 claims
- 1858US12105414B2Targets for diffraction-based overlay error metrologyKLA CORP·Filed 2022·Granted Oct 1, 2024·0 cites·16 claims
- 1958US2024302751A1Multi-overlay stacked grating metrology targetKLA CORP·Filed 2023·Application pending·0 cites
- 2057US2024068804A1Multi-pitch grid overlay target for scanning overlay metrologyKLA CORP·Filed 2023·Application pending·0 cites
- 2157US2024167813A1System and method for suppression of tool induced shift in scanning overlay metrologyKLA CORP·Filed 2023·Application pending·0 cites
- 2255US2025314482A1Focus position measurement while scanningKLA CORP·Filed 2024·Application pending·0 cites
- 2353US12422363B2Scanning scatterometry overlay metrologyKLA CORP·Filed 2022·Granted Sep 23, 2025·0 cites·51 claims
- 2453US2024035782A1Compact supersonic projectile trackingSYNCHROSENSE LTD·Filed 2023·Application pending·0 cites
- 2551US12105431B2Annular apodizer for small target overlay measurementKLA CORP·Filed 2022·Granted Oct 1, 2024·0 cites·9 claims
- 2640US2018342063A1Diffraction Based Overlay ScatterometryKLA TENCOR CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →