Inventor · disambiguated record
Yuji Obata
Also filed as: OBATA YUJI
3 granted patents·2 pending applications·3 citations·filing 2012–2024
53Inventor score
Top patents by PatentIndex Score
5 records- 0180US12024776B2Gas supply apparatus, gas supply method, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jul 2, 2024·1 cites·19 claims
- 0264US9224623B2Microwave irradiation apparatusKASAI SHIGERU·Filed 2012·Granted Dec 29, 2015·2 cites·8 claims
- 0354US12365985B2Deposition apparatus with pressure sensor and shower head on same plane and deposition methodTOKYO ELECTRON LTD·Filed 2021·Granted Jul 22, 2025·0 cites·8 claims
- 0450US2025018302A1Non-transitory computer readable medium, information processing method, and information processing systemCYGAMES INC·Filed 2024·Application pending·0 cites
- 0547US2024241042A1Substrate processing device and method for measuring process gas temperature and concentrationTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →