Inventor · disambiguated record
Yulin Peng
Also filed as: PENG YULIN
3 granted patents·4 pending applications·1 citations·filing 2016–2024
50Inventor score
Top patents by PatentIndex Score
7 records- 0169US10985045B2Electrostatic chuck mechanism and semiconductor processing device having the sameBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Apr 20, 2021·1 cites·19 claims
- 0265US2024271310A1Reaction chamber component, preparation method, and reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 0351US10170285B2Method of operating semiconductor manufacturing apparatus and semiconductor devicesBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Jan 1, 2019·0 cites·18 claims
- 0451US2025239438A1Multi-layer focus ring for plasma semiconductor processingBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Application pending·0 cites
- 0551US2024321560A1Substrate support including multiple radio frequency (rf) electrodesBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Application pending·0 cites
- 0650US9899194B2Apparatus for plasma treatment and method of operating the apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted Feb 20, 2018·0 cites·20 claims
- 0739US2020406222A1Reaction chamber component, preparation method, and reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →