Inventor · disambiguated record
Yusuke Tachino
Also filed as: TACHINO YUSUKE
4 granted patents·5 pending applications·463 citations·filing 2012–2019
71Inventor score
Top patents by PatentIndex Score
9 records- 0196US9640448B2Film forming method, film forming apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 2, 2017·463 cites·8 claims
- 0265US11486043B2Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus thereforTOKYO ELECTRON LTD·Filed 2019·Granted Nov 1, 2022·0 cites·14 claims
- 0356US9758867B2Method of controlling gas supply apparatus and substrate processing systemTOKYO ELECTRON LTD·Filed 2014·Granted Sep 12, 2017·0 cites·8 claims
- 0453US2013340678A1Gas supply apparatus and film forming apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0551US9422624B2Heat treatment methodTOKYO ELECTRON LTD·Filed 2015·Granted Aug 23, 2016·0 cites·11 claims
- 0651US2013205611A1Gas supply apparatus and heat treatment apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0742US2015221529A1Gas supply method and thermal treatment methodTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 0840US2015259792A1Method of Forming Titanium Carbonitride Film and Film Formation Apparatus ThereforTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 0939US2012288625A1Gas supply apparatus, thermal treatment apparatus, gas supply method, and thermal treatment methodFURUYA HARUHIKO·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →