Inventor · disambiguated record
Zefram Marks
Also filed as: MARKS ZEFRAM · MARKS ZEFRAM D
7 granted patents·2 pending applications·3 citations·filing 2016–2021
71Inventor score
Top patents by PatentIndex Score
9 records- 0182US11268911B2Boron-based capping layers for EUV opticsKLA TENCOR CORP·Filed 2019·Granted Mar 8, 2022·2 cites·9 claims
- 0270US10741354B1Photocathode emitter system that generates multiple electron beamsKLA TENCOR CORP·Filed 2018·Granted Aug 11, 2020·1 cites·18 claims
- 0359US11156926B2Vacuum actuator containment for molecular contaminant and particle mitigationKLA CORP·Filed 2020·Granted Oct 26, 2021·0 cites·20 claims
- 0458US11968772B2Optical etendue matching methods for extreme ultraviolet metrologyKLA CORP·Filed 2020·Granted Apr 23, 2024·0 cites·37 claims
- 0558US10714294B2Metal protective layer for electron emitters with a diffusion barrierKLA TENCOR CORP·Filed 2019·Granted Jul 14, 2020·0 cites·16 claims
- 0648US10840055B2System and method for photocathode illumination inspectionKLA TENCOR CORP·Filed 2019·Granted Nov 17, 2020·0 cites·33 claims
- 0746US12360058B2Integration of an optical height sensor in mask inspection toolsKLA CORP·Filed 2021·Granted Jul 15, 2025·0 cites·24 claims
- 0845US2021132506A1Ionic Liquids as Lubricants in Optical SystemsKLA CORP·Filed 2020·Application pending·0 cites
- 0938US2018066132A1Conductive polymeric compositions and applicationsUNIV COLORADO REGENTS·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →