Inventor · disambiguated record
Zhuangxiong Huang
Also filed as: HUANG ZHUANGXIONG
6 granted patents·3 pending applications·0 citations·filing 2020–2023
63Inventor score
Top patents by PatentIndex Score
9 records- 0164US12346031B2Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2021·Granted Jul 1, 2025·0 cites·13 claims
- 0257US12158705B2End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatusesASML HOLDING NV·Filed 2021·Granted Dec 3, 2024·0 cites·20 claims
- 0356US12292696B2Fluid purging system, projection system, illumination system, lithographic apparatus, and methodASML NETHERLANDS BV·Filed 2021·Granted May 6, 2025·0 cites·20 claims
- 0452US11703768B2Lithographic apparatus and related methodsASML NETHERLANDS BV·Filed 2020·Granted Jul 18, 2023·0 cites·16 claims
- 0552US2025349526A1Fluid dispensing system and methodASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0650US2025060681A1A system for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0749US12411425B2Fluid purging systemASML NETHERLANDS BV·Filed 2021·Granted Sep 9, 2025·0 cites·15 claims
- 0845US12332570B2Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debrisASML HOLDING NV·Filed 2020·Granted Jun 17, 2025·0 cites·15 claims
- 0943US2025021022A1Electrostatic holder, object table and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →