US12363965B2ActiveUtilityA1

Stacked transistor layout for improved cell height scaling

63
Assignee: IBMPriority: Aug 11, 2022Filed: Aug 11, 2022Granted: Jul 15, 2025
Est. expiryAug 11, 2042(~16.1 yrs left)· nominal 20-yr term from priority
H10D 84/856H10D 62/151H10D 30/6757H10D 30/43H10D 64/017H10D 30/014H10D 30/6735H10D 64/251H10D 62/121H10D 84/85H10D 84/83H10D 88/00H10D 89/10H10D 84/0186H10D 84/017H10D 84/0149H10D 84/013H10D 84/038B82Y 10/00H10D 88/01
63
PatentIndex Score
0
Cited by
19
References
20
Claims

Abstract

Embodiments of the invention include a first source region and a first drain region forming a first L-shaped layout. The first source and drain regions are formed on a bottom gate spacer material. Embodiments include a second source region and a second drain region forming a second L-shaped layout, the first L-shaped layout and the second L-shaped layout being interrupted by a gate. One of the first source and drain regions extends in a direction beyond the bottom gate spacer material to form the first L-shaped layout, wherein the direction is parallel to a lengthwise direction of the gate.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A semiconductor structure comprising:
 a first source region and a first drain region forming a first L-shaped layout, the first source and drain regions being formed on a bottom gate spacer material; and 
 a second source region and a second drain region forming a second L-shaped layout, the first L-shaped layout and the second L-shaped layout being interrupted by a gate, wherein one of the first source and drain regions extends in a direction beyond the bottom gate spacer material to form the first L-shaped layout, wherein the direction is parallel to a lengthwise direction of the gate. 
 
     
     
       2. The semiconductor structure of  claim 1 , wherein:
 the first source region and the first drain region comprise epitaxial material; and 
 the second source region and the second drain region comprise epitaxial material. 
 
     
     
       3. The semiconductor structure of  claim 1 , wherein a stacked field-effect transistor comprises the first source region, the first drain region, the second source region, the second drain region, and the gate. 
     
     
       4. The semiconductor structure of  claim 1 , wherein a first portion of the first L-shaped layout overlaps a second portion of the second L-shaped layout. 
     
     
       5. The semiconductor structure of  claim 1 , wherein the first L-shaped layout and the second L-shaped layout have different orientations such that the first and second L-shaped layouts avoid a complete overlap. 
     
     
       6. The semiconductor structure of  claim 1 , wherein a first channel region associated with the first source region and the first drain region overlaps a second channel region associated with the second source region and the second drain region. 
     
     
       7. The semiconductor structure of  claim 1 , wherein the first source region and the first drain region are doped to be complementary to the second source region and the second drain region. 
     
     
       8. The semiconductor structure of  claim 1 , wherein a first end of the first L-shaped layout is configured to operatively couple to a first power source and a second end of the second L-shaped layout is configured to operatively couple to a second power source, the first end and the second end being non-overlapping. 
     
     
       9. The semiconductor structure of  claim 1 , wherein an overlapped end of the first L-shaped layout and the second L-shaped layout is configured to operatively couple to an output connection. 
     
     
       10. The semiconductor structure of  claim 1 , wherein the gate is configured to operatively coupled to an input connection in proximity to the first source and drain regions and the second source and drain regions. 
     
     
       11. A method comprising:
 providing a first source region and a first drain region forming a first L-shaped layout, the first source and drain regions being formed on a bottom gate spacer material; and 
 providing a second source region and a second drain region forming a second L-shaped layout, the first L-shaped layout and the second L-shaped layout being interrupted by a gate, wherein one of the first source and drain regions extends in a direction beyond the bottom gate spacer material to form the first L-shaped layout, wherein the direction is parallel to a lengthwise direction of the gate. 
 
     
     
       12. The method of  claim 11 , wherein:
 the first source region and the first drain region comprise epitaxial material; and 
 the second source region and the second drain region comprise epitaxial material. 
 
     
     
       13. The method of  claim 11 , wherein a stacked field-effect transistor comprises the first source region, the first drain region, the second source region, the second drain region, and the gate. 
     
     
       14. The method of  claim 11 , wherein a first portion of the first L-shaped layout overlaps a second portion of the second L-shaped layout. 
     
     
       15. The method of  claim 11 , wherein the first L-shaped layout and the second L-shaped layout have different orientations such that the first and second L-shaped layouts avoid a complete overlap. 
     
     
       16. The method of  claim 11 , wherein a first channel region associated with the first source region and the first drain region overlaps a second channel region associated with the second source region and the second drain region. 
     
     
       17. The method of  claim 11 , wherein the first source region and the first drain region are doped to be complementary to the second source region and the second drain region. 
     
     
       18. The method of  claim 11 , wherein a first end of the first L-shaped layout is configured to operatively couple to a first power source and a second end of the second L-shaped layout is configured to operatively couple to a second power source, the first end and the second end being non-overlapping. 
     
     
       19. The method of  claim 11 , wherein an overlapped end of the first L-shaped layout and the second L-shaped layout is configured to operatively couple to an output connection. 
     
     
       20. The method of  claim 11 , wherein the gate is configured to operatively coupled to an input connection in proximity to the first source and drain regions and the second source and drain regions.

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