Pressure sensitive adhesive double coated sheet

Abstract

A pressure sensitive adhesive double coated sheet comprising a shrink substrate and, superimposed on both sides thereof, pressure sensitive adhesive layers, at least one of the pressure sensitive adhesive layers being composed of an energy radiation curable pressure sensitive adhesive. The pressure sensitive adhesive double coated sheet enables efficient processing of a work piece with high precision. In particular, the pressure sensitive adhesive double coated sheet is suitable to a process capable of producing IC chips of high thickness precision with high yield by reducing warpage and minimizing carrying breakage in the grinding of extremely thin or large diameter silicon wafers and capable of performing back grinding and dicing in the same configuration.

The invention claimed is:  
     
         1 . A pressure sensitive adhesive double coated sheet comprising a shrink substrate and, superimposed on both sides thereof, pressure sensitive adhesive layers, at least one of the pressure sensitive adhesive layers being composed of an energy radiation curable pressure sensitive adhesive.  
     
     
         2 . The pressure sensitive adhesive double coated sheet as claimed in  claim 1 , wherein both of the pressure sensitive adhesive layers are composed of an energy radiation curable pressure sensitive adhesive.  
     
     
         3 . The pressure sensitive adhesive double coated sheet as claimed in  claim 1 , wherein the shrink substrate is furnished with a multiplicity of minute cuts.  
     
     
         4 . The pressure sensitive adhesive double coated sheet as claimed in  claim 2 , wherein the shrink substrate is furnished with a multiplicity of minute cuts.  
     
     
         5 . The pressure sensitive adhesive double coated sheet as claimed in  claim 1 , for use in fixing or protecting a work piece during processing of the work piece temporarily held on a hard plate.  
     
     
         6 . The pressure sensitive adhesive double coated sheet as claimed in  claim 2 , for use in fixing or protecting a work piece during processing of the work piece temporarily held on a hard plate.  
     
     
         7 . The pressure sensitive adhesive double coated sheet as claimed in  claim 3 , for use in fixing or protecting a work piece during processing of the work piece temporarily held on a hard plate.  
     
     
         8 . The pressure sensitive adhesive double coated sheet as claimed in  claim 4 , for use in fixing or protecting a work piece during processing of the work piece temporarily held on a hard plate.