Chemical vapor deposition method for depositing silicide and apparatus for performing the same

Abstract

A chemical vapor deposition (CVD) method for depositing a silicide and a CVD system for performing the same are disclosed. A silicide is deposited on a substrate. Residual gases remaining from the depositing step are purged out by flowing air including H 2 O (g), to substantially remove fumes caused by the residual gases. In the purge step, the cycle purge is carried out at the conditions similar to the flow of atmosphere, to substantially remove the fumes.

What is claimed is:  
     
         1 . A chemical vapor deposition method, comprising: 
 (i) depositing a silicide on a substrate; and    (ii) purging residual gases remaining from said depositing step by using air including H 2 O gas.    
     
     
         2 . The method as recited in  claim 1 , wherein in (i), said silicide is deposited using tungsten hexafluoride (WF 6 ) and dichlorosilane (DCS) as reaction gases.  
     
     
         3 . The method as recited in  claim 1 , wherein in (i), said silicide is deposited at a pressure in the range of approximately 0.1 Torr to approximately 760 Torr and a temperature in the range of approximately 500° C. to approximately 800° C.  
     
     
         4 . The method as recited in  claim 1 , wherein in (ii), said air including H 2 O gas further includes O 2  gas and at least one inert gas.  
     
     
         5 . The method as recited in  claim 4 , wherein said at least one inert gas is selected from the group consisting essentially of argon (Ar), nitrogen (N 2 ), and helium (He).  
     
     
         6 . The method as recited in  claim 4 , wherein a partial pressure of each of said O 2  gas and said H 2 O gas is approximately 10% or more.  
     
     
         7 . The method as recited in  claim 1 , wherein the method further comprises: 
 after (ii), purging said residual gases by successively flowing O 2  gas and at least one inert gas.    
     
     
         8 . The method as recited in  claim 1 , wherein in (ii), said purging of said residual gases is carried out at a pressure in the range of approximately 500 Torr to approximately 760 Torr.  
     
     
         9 . A chemical vapor deposition method, comprising: 
 (i) loading a substrate in a load-lock chamber of a CVD system;    (ii) transferring said substrate into a processing chamber;    (iii) depositing a silicide on said substrate in said processing chamber;    (iv) transferring said substrate into said load-lock chamber; and    (v) purging residual gases remaining from said depositing step by flowing air including H 2 O (g) into said load-lock chamber.    
     
     
         10 . The method as recited in  claim 9 , wherein in (iii), WF 6  and DCS are introduced as reaction gases into said processing chamber.  
     
     
         11 . The method as recited in  claim 9 , wherein in (v), said air including H 2 O gas further includes O 2  gas and at least one inert gas.  
     
     
         12 . The method as recited in  claim 11 , wherein a partial pressure of each of said O 2  gas and said H 2 O gas is 10% or more.  
     
     
         13 . The method as recited in  claim 9 , wherein in (v), said purging of said residual gases is carried out at a pressure in the range of approximately 500 Torr to approximately 760 Torr.  
     
     
         14 . The method as recited in  claim 9 , the method further comprising: 
 after (v), purging said residual gases by successively flowing O 2  gas and at least one inert gas.    
     
     
         15 . A chemical vapor deposition apparatus, comprising: 
 a load-lock chamber;    a processing chamber mounted on said load-lock chamber;    a vent line connected with said load-lock chamber; and    an air purge line connected with said load-lock chamber, wherein said air purge line supplies air including H 2 O gas.    
     
     
         16 . The apparatus as recited in  claim 15 , wherein said air purge line and said vent line are connected to each other.  
     
     
         17 . The apparatus as recited in  claim 16 , further comprising a vacuum pump connected to said vent line.  
     
     
         18 . The apparatus as recited in  claim 15 , further comprising an O 2  gas line connected to said air purge line.  
     
     
         19 . The apparatus as recited in  claim 15 , further comprising a filter connected to said air purge line.  
     
     
         20 . The apparatus as recited in  claim 15 , further comprising a vacuum pump connected to said air purge line.