Integrated pressure control system for workpiece carrier

Abstract

An integrated pressure control system for a workpiece carrier includes a multizone carrier workpiece having multiple pressurizable zones and a pressure control system mounted to the carrier for controlling pressure provided to the pressurizable zones. The present invention also includes a workpiece carrier having a housing, a workpiece bladder coupled to the housing, and at least one pressure transducer mounted to the carrier housing for controlling pressure provided to the workpiece bladder.

1 . A workpiece carrier comprising: 
 a carrier housing    a workpiece bladder coupled to said housing, said workpiece bladder having a surface configured to press against a surface of a workpiece; and    at least one pressure transducer mounted to said carrier housing for controlling pressure provided to said workpiece bladder.    
     
     
         2 . The workpiece carrier of  claim 1  wherein said bladder comprises a plurality of pressurizable zones and each zone has a pressure transducer for monitoring pressure to that zone.  
     
     
         3 . The workpiece carrier of  claim 1  further comprising at least one valve mounted to said carrier.  
     
     
         4 . The workpiece carrier of  claim 1  further comprising a control board mounted to said carrier.  
     
     
         5 . The workpiece carrier of  claim 1  further comprising means for automatically calibrating said at least one pressure transducer.  
     
     
         6 . An integrated pressure control system for planarizing a workpiece comprising: 
 a multizone workpiece carrier having a plurality of pressurizable zones; and    a pressure control system mounted to said carrier for controlling pressure provided to said plurality of pressurizable zones.    
     
     
         7 . The integrated pressure control system of  claim 6  further comprising an automatic calibration system for calibrating said pressure control system.  
     
     
         8 . The integrated pressure control system of  claim 6  wherein said pressure control system comprises at least one pressure transducer.  
     
     
         9 . The integrated pressure control system of  claim 8  wherein said pressure control system further comprises at least one valve.  
     
     
         10 . The integrated pressure control system of  claim 6  further comprising a rotary union for connecting electrical lines to said pressure control system.  
     
     
         11 . The integrated pressure control system of  claim 10  wherein said rotary union further connects an air supply line and an air exhaust line to said pressure control system.  
     
     
         12 . A carrier insert for a multizone workpiece carrier comprising: 
 a pneumatic manifold having a plurality of ports in alignment with a plurality of pressurizable zones located in said multizone workpiece carrier; and    at least one pressure transducer mounted to said pneumatic manifold.    
     
     
         13 . The carrier insert of  claim 12  further comprising at least one valve mounted to said pneumatic manifold.  
     
     
         14 . The carrier insert of  claim 13  further comprising a control board mounted to said pneumatic manifold.