Inventor · disambiguated record
Nikolay Korovin
Also filed as: KOROVIN NIKOLAY · KOROVIN NIKOLAY N · KOROVINA LEGAL REPRESENTATIVE · SHUGRUE JOHN
22 granted patents·2 pending applications·766 citations·filing 2000–2005
97Inventor score
Top patents by PatentIndex Score
24 records- 0198US7140956B1Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2005·Granted Nov 28, 2006·67 cites·7 claims
- 0297US6736952B2Method and apparatus for electrochemical planarization of a workpieceSPEEDFAM IPEC CORP·Filed 2001·Granted May 18, 2004·155 cites·74 claims
- 0397US6390905B1Workpiece carrier with adjustable pressure zones and barriersSPEEDFAM IPEC CORP·Filed 2000·Granted May 21, 2002·137 cites·13 claims
- 0496US6659850B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2002·Granted Dec 9, 2003·97 cites·21 claims
- 0595US7189140B1Methods using eddy current for calibrating a CMP toolNOVELLUS SYSTEMS INC·Filed 2005·Granted Mar 13, 2007·33 cites·20 claims
- 0691US6612903B2Workpiece carrier with adjustable pressure zones and barriersSPEEDFAM IPEC CORP·Filed 2002·Granted Sep 2, 2003·40 cites·16 claims
- 0788US6932671B1Method for controlling a chemical mechanical polishing (CMP) operationNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 23, 2005·33 cites·21 claims
- 0887US6572755B2Method and apparatus for electrochemically depositing a material onto a workpiece surfaceSPEEDFAM IPEC CORP·Filed 2001·Granted Jun 3, 2003·33 cites·79 claims
- 0987US6544103B1Method to determine optimum geometry of a multizone carrierSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 8, 2003·30 cites·8 claims
- 1082US6582277B2Method for controlling a process in a multi-zonal apparatusSPEEDFAM IPEC CORP·Filed 2001·Granted Jun 24, 2003·23 cites·23 claims
- 1181US7198545B1Method of calibration and data evaluation for eddy current metrology systemsNOVELLUS SYSTEMS INC·Filed 2005·Granted Apr 3, 2007·15 cites·19 claims
- 1281US6953382B1Methods and apparatuses for conditioning polishing surfaces utilized during CMP processingNOVELLUS SYSTEMS INC·Filed 2004·Granted Oct 11, 2005·23 cites·49 claims
- 1380US6468131B1Method to mathematically characterize a multizone carrierSPEEDFAM IPEC CORP·Filed 2000·Granted Oct 22, 2002·20 cites·12 claims
- 1473US7025664B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2004·Granted Apr 11, 2006·10 cites·7 claims
- 1568US6951597B2Dynamic polishing fluid delivery system for a rotational polishing apparatusNOVELLUS SYSTEMS INC·Filed 2003·Granted Oct 4, 2005·11 cites·18 claims
- 1665US6974525B2Method and apparatus for electrochemical planarization of a workpieceSPEEDFAM IPEC CORP·Filed 2004·Granted Dec 13, 2005·7 cites·10 claims
- 1764US6336853B1Carrier having pistons for distributing a pressing force on the back surface of a workpieceSPEEDFAM IPEC CORP·Filed 2000·Granted Jan 8, 2002·10 cites·13 claims
- 1862US6503767B2Process for monitoring a process, planarizing a surface, and for quantifying the results of a planarization processSPEEDFAM IPEC CORP·Filed 2000·Granted Jan 7, 2003·8 cites·29 claims
- 1960US6790123B2Method for processing a work piece in a multi-zonal processing apparatusSPEEDFAM IPEC CORP·Filed 2002·Granted Sep 14, 2004·7 cites·20 claims
- 2058US8268135B2Method and apparatus for electrochemical planarization of a workpieceEMESH ISMAIL·Filed 2005·Granted Sep 18, 2012·1 cites·10 claims
- 2154US6508694B2Multi-zone pressure control carrierSPEEDFAM IPEC CORP·Filed 2001·Granted Jan 21, 2003·5 cites·15 claims
- 2249US7014541B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2003·Granted Mar 21, 2006·1 cites·7 claims
- 2338US2003077986A1Front-reference carrier on orbital solid platenSPEEDFAM IPEC CORP·Filed 2002·Application pending·0 cites
- 2436US2005070205A1Integrated pressure control system for workpiece carrierSPEEDFAM IPEC CORP·Filed 2003·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Nikolay Korovin files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →