Inventor · disambiguated record
John D. Herb
Also filed as: HERB JOHN · HERB JOHN D · HERB JOHN DERWOOD
15 granted patents·2 pending applications·513 citations·filing 2000–2005
95Inventor score
Top patents by PatentIndex Score
17 records- 0198US7140956B1Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2005·Granted Nov 28, 2006·67 cites·7 claims
- 0297US6390905B1Workpiece carrier with adjustable pressure zones and barriersSPEEDFAM IPEC CORP·Filed 2000·Granted May 21, 2002·137 cites·13 claims
- 0396US6659850B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2002·Granted Dec 9, 2003·97 cites·21 claims
- 0492US6447379B1Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method thereforSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 10, 2002·52 cites·10 claims
- 0591US6612903B2Workpiece carrier with adjustable pressure zones and barriersSPEEDFAM IPEC CORP·Filed 2002·Granted Sep 2, 2003·40 cites·16 claims
- 0686US6540592B1Carrier head with reduced moment wear ringSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 1, 2003·29 cites·24 claims
- 0779US6878039B2Polishing pad window for a chemical-mechanical polishing toolSPEEDFAM IPEC CORP·Filed 2002·Granted Apr 12, 2005·20 cites·26 claims
- 0874US6599175B2Apparatus for distributing a fluid through a polishing padSPEEDFAM IPECA CORP·Filed 2001·Granted Jul 29, 2003·18 cites·15 claims
- 0973US7025664B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2004·Granted Apr 11, 2006·10 cites·7 claims
- 1070US6913528B2Low amplitude, high speed polisher and methodSPEEDFAM IPEC CORP·Filed 2001·Granted Jul 5, 2005·13 cites·13 claims
- 1165US7229339B2CMP apparatus and methodNOVELLUS SYSTEMS INC·Filed 2004·Granted Jun 12, 2007·12 cites·11 claims
- 1264US6336853B1Carrier having pistons for distributing a pressing force on the back surface of a workpieceSPEEDFAM IPEC CORP·Filed 2000·Granted Jan 8, 2002·10 cites·13 claims
- 1352US6568991B2Method and apparatus for sensing a wafer in a carrierSPEEDFAM IPEC CORP·Filed 2001·Granted May 27, 2003·4 cites·40 claims
- 1449US7014541B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2003·Granted Mar 21, 2006·1 cites·7 claims
- 1548US7040957B2Platen and manifold for polishing workpiecesNOVELLUS SYSTEMS INC·Filed 2003·Granted May 9, 2006·3 cites·9 claims
- 1638US2003077986A1Front-reference carrier on orbital solid platenSPEEDFAM IPEC CORP·Filed 2002·Application pending·0 cites
- 1736US2005070205A1Integrated pressure control system for workpiece carrierSPEEDFAM IPEC CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →