Flat-object holder and method of using the same

Abstract

A flat-object holder can hold a flat object-and-frame assembly, and the holder has the flat object fixed to the frame with protection tape. The flat-object holder includes at least a flat object supporting area for fixedly holding the flat object via the protection tape by applying a suction force, and a frame fixing area for fastening the frame. The flat-object holder bearing the flat object-and-frame assembly can be fixedly held by a selected chuck table by applying a negative pressure to the flat object supporting area. The flat-object holder can transfer and put the flat object-and-frame assembly in a container. Thus, no matter how thin the flat object may be, it can be handled without the fear of breaking.

1 . A flat-object holder for holding a flat object-and-frame assembly having a flat object fixed to a frame with a protection tape comprising at least a flat object supporting area for fixedly holding the flat object via the protection tape by applying a suction force, and a frame fixing area for fastening the frame.  
     
     
         2 . A flat-object holder according to  claim 1 , wherein the flat object supporting area is formed by a porous member.  
     
     
         3 . A flat-object holder according to  claim 2 , wherein the frame has an opening for accommodating the flat object and a tape applying area encircling the opening for having the protection tape applied thereto, the frame fixing area being at a level lower than the flat object supporting area.  
     
     
         4 . A flat-object holder according to  claim 3 , wherein the top surface of the frame when being fastened to the frame fixing area is positioned at a level lower than the upper surface of the flat object supporting area.  
     
     
         5 . A flat-object holder according to  claim 1 , wherein the frame fixing area comprises a frame fastening section and frame releasing means.  
     
     
         6 . A flat-object holder according to  claim 2 , wherein the frame comprises a ring-like body defining an opening for accommodating the flat object and using its brim or inner circumference as a protection tape support, the frame fixing area being at a level lower than the upper surface of the flat object supporting area, whereby the protection tape may be fixedly stretched between the outer circumference of the flat object supporting area and the inner circumference of the ring-like frame.  
     
     
         7 . A flat-object holder according to  claim 6 , wherein the frame has tightening-and-loosing means associated therewith.  
     
     
         8 . A flat-object holder according to  claim 1 , wherein it is so constructed that a plurality of frames each holding a flat-object therein may be laid on each other.  
     
     
         9 . A flat-object holder according to  claim 8 , wherein it has a recess made on its bottom to accommodate the flat object of the lower flat-object holder in non-contact fashion when two or more flat-object holders are laid on each other; the flat-object holder has a bearing section formed on its top to abut on the circumference of the bottom recess of the upper flat-object holder for bearing the upper flat-object holder; and the flat-object holder has a riding section formed on its bottom to surround the bottom recess and ride on the bearing section of the lower flat-object holder.  
     
     
         10 . A flat-object holder according to  claim 1 , wherein the flat object supporting area has temperature-controlling means embedded therein.  
     
     
         11 . A flat-object holder according to  claim 10 , wherein the temperature controlling means is capable of heating or cooling a selected area of the flat object.  
     
     
         12 . A flat-object holder according to  claim 10 , wherein the temperature controlling means includes a pipe for permitting thermal medium to pass therein, an electric heating wire or a Peltier element.  
     
     
         13 . A flat-object holder according to any of  claim 1 , wherein it further comprises identification means.  
     
     
         14 . A flat-object holder according to  claim 13 , wherein the identification means includes barcodes or IC chips.  
     
     
         15 - 18 . (canceled).