Adaptable electrochemical processing chamber

Abstract

An electrochemical processing chamber which can be modified for treating different workpieces and methods for so modifying electrochemical processing chambers. In one particular embodiment, an electrochemical processing chamber 200 includes a plurality of walls 510 defining a plurality of electrode compartments 520 , each electrode compartment having at least one electrode 600 therein, and a virtual electrode unit 530 defining a plurality of flow conduits, with at least one of the flow conduits being in fluid communication with each of the electrode compartments. This first virtual electrode unit 530 may be exchanged for a second virtual electrode unit 540 , without modification of any of the electrodes 600 , to adapt the processing chamber 200 for treating a different workpiece.

1 - 20 . (canceled)  
     
     
         21 . An electrochemical processing chamber, comprising: 
 a reaction vessel having an interior;    an electrode received in the interior of the reaction vessel; and    a first virtual electrode unit comprising a dielectric material and defining a first virtual electrode in fluid communication with the electrode, the first virtual electrode unit being exchangeable for a second virtual electrode unit, without necessitating modification of the electrode, to adapt the processing chamber for treating a differently-sized workpiece.    
     
     
         22 . An electrochemical processing chamber, comprising: 
 a reaction vessel having an inner surface;    a first wall spaced from the inner surface of the reaction vessel, the first wall being formed of a dielectric material and electrically separating a first electrode compartment from a second electrode compartment;    a first electrode positioned in the first electrode compartment and a second electrode positioned in the second electrode compartment; and    a first virtual electrode unit comprising a dielectric material and defining a first virtual electrode in fluid communication with the first electrode compartment, the first partition also defining, in part, a second virtual electrode in fluid communication with the outer electrode compartment, the first virtual electrode unit being exchangeable for a second virtual electrode unit, without necessitating modification of the electrodes, to adapt the processing chamber for treating a differently-sized workpiece.    
     
     
         23 . The electrochemical processing chamber of  claim 22  wherein the first virtual electrode unit comprises a first partition having a first section extending radially inwardly from the first wall and a lip defining a circular opening.  
     
     
         24 . The electrochemical processing chamber of  claim 22  wherein the first wall is carried by the first virtual electrode unit and is removable therewith as a unit when exchanging the first virtual electrode unit for the second virtual electrode unit.  
     
     
         25 . The electrochemical processing chamber of  claim 22  further comprising a flow distributor having a first fluid outlet associated with the first electrode compartment and a second fluid outlet associated with the second electrode compartment.  
     
     
         26 . The electrochemical processing chamber of  claim 25  wherein the first wall is carried by the first virtual electrode unit and the first wall has a lower edge releasably received in an annular recess in the flow distributor positioned between the first fluid outlet and the second fluid outlet.  
     
     
         27 . The electrochemical processing chamber of  claim 22  wherein the first virtual electrode comprises a central discharge opening through which fluid may flow.  
     
     
         28 . The electrochemical processing chamber of  claim 27  wherein the first virtual electrode receives an electrical potential via flow of an electrically conductive fluid over the first electrode and upwardly through the first virtual electrode.  
     
     
         29 . The electrochemical processing chamber of  claim 27  wherein the second virtual electrode comprises an annular opening through which fluid may flow.  
     
     
         30 . The electrochemical processing chamber of  claim 29  wherein the second virtual electrode receives an electrical potential via flow of an electrically conductive fluid over the second electrode and upwardly through the second virtual electrode.  
     
     
         31 . The electrochemical processing chamber of  claim 22  wherein the first virtual electrode receives a first electrical potential from the first electrode.  
     
     
         32 . The electrochemical processing chamber of  claim 31  wherein the second virtual electrode receives a second electrical potential from the second electrode.  
     
     
         33 . The electrochemical processing chamber of  claim 22  wherein the electrodes are anodes.  
     
     
         34 . An electrochemical processing chamber, comprising: 
 a plurality of concentric walls defining a plurality of concentric annular electrode compartments, the walls being formed of a dielectric material;    a plurality of electrodes, each of the electrode compartments having at least one of the electrodes positioned therein;    a fluid distributor having a plurality of fluid channels, each of the electrode compartments being in fluid communication with at least one of the fluid channels; and    a first virtual electrode unit formed of a dielectric material, the first virtual electrode unit defining a plurality of flow conduits, with at least one of the flow conduits being in fluid communication with each of the electrode compartments, the first virtual electrode unit being exchangeable for a second virtual electrode unit, without modification of any of the electrodes, to adapt the processing chamber for treating a differently-sized workpiece.    
     
     
         35 . The electrochemical processing chamber of  claim 34  wherein the walls are coupled to the first virtual electrode unit and can be removed therewith as a unit.  
     
     
         36 . The electrochemical processing chamber of  claim 34  wherein the walls are carried by the fluid distributor and remain attached thereto when the virtual electrode unit is removed.  
     
     
         37 . The electrochemical processing chamber of  claim 34  wherein the virtual electrode unit comprises a plurality of partitions, with one partition being associated with each of the walls.  
     
     
         38 . The electrochemical processing chamber of  claim 37  wherein the plurality of partitions are joined to one another such that the virtual electrode unit may be exchanged as a unit.  
     
     
         39 . The electrochemical processing chamber of  claim 34  further comprising a second virtual electrode unit exchangeable for the first virtual electrode unit, each of the first and second virtual electrode units being adapted to adjoin the walls at the same radial distances from a center line of the processing chamber.  
     
     
         40 . The electrochemical processing chamber of  claim 34  an inner one of the flow conduits of the first virtual electrode unit defines a central discharge opening and each of the other flow conduits of the first virtual electrode unit defines concentric annular discharge openings.  
     
     
         41 . The electrochemical processing chamber of  claim 40  wherein each of the flow conduits defines a separately controllable virtual electrode.  
     
     
         42 . The electrochemical processing chamber of  claim 34  wherein each of the flow conduits defines a separately controllable virtual electrode.  
     
     
         43 . The electrochemical processing chamber of  claim 34  wherein the first virtual electrode unit comprises a plurality of partitions, each partition being having a first section and a lip, the first section being coupled to one of the walls and extending radially inwardly therefrom, the lip defining a circular opening.  
     
     
         44 . The electrochemical processing chamber of  claim 34  further comprising a flow distributor having a plurality of fluid conduits, with one fluid conduit being in fluid communication with each of the electrode compartments.  
     
     
         45 . The electrochemical processing chamber of  claim 44  wherein the walls are carried by the first virtual electrode unit and each of the walls has a lower edge releasably received in a separate annular recess in the flow distributor.  
     
     
         46 . An electrochemical processing chamber, comprising: 
 a reaction vessel comprising:    a vessel wall defining an interior of the reaction vessel; and    first and second electrodes, the first electrode being spaced radially inwardly of the second electrode; and    a replaceable field shaping unit comprising:    a first wall removably received in the interior of the reaction vessel, the first wall being formed of a dielectric material and electrically separating a first electrode compartment from a second electrode compartment, the first electrode being positioned within the first electrode compartment and the second electrode being positioned within the second electrode compartment;    a virtual electrode unit comprising a first partition formed of a dielectric material and coupled to the first wall, the first partition defining a first virtual electrode in fluid communication with the first electrode compartment and defining, in part, a second virtual electrode in fluid communication with the second electrode compartment;    the replaceable field shaping unit being removable from the reaction vessel as a unit without necessitating modification of the reaction vessel.    
     
     
         47 . The electrochemical processing chamber of  claim 46  wherein the reaction vessel has an outer wall with an upper edge, an outer portion of the virtual electrode unit engaging the upper edge of the outer wall in defining the second electrode compartment.  
     
     
         48 . An electrochemical processing chamber, comprising: 
 a replaceable first field shaping unit comprising:    a plurality of concentric walls electrically separating a plurality of concentric electrode compartments; and    a virtual electrode unit comprising a plurality of partitions, each of the walls having a separate partition coupled thereto, the virtual electrode unit defining a plurality of virtual electrodes, with a separate virtual electrode in fluid communication with each of the electrode compartments; and    a reaction vessel comprising:    a vessel wall defining an interior receiving the walls of the first replaceable field shaping unit; and    a plurality of electrodes, at least one of the electrodes being positioned in each of the electrode compartments;    the replaceable first field shaping unit being removable from the reaction vessel as a unit for replacement with a second field shaping unit, without necessitating modification of any of the plurality of electrodes, to adapt the electrochemical processing chamber for use with a differently-sized workpiece.    
     
     
         49 . The electrochemical processing chamber of  claim 48  wherein the second field shaping unit comprises: 
 a plurality of concentric walls adapted to electrically separate a plurality of concentric electrode compartments when the plurality of walls is installed in the interior of the reaction vessel; and    a virtual electrode unit comprising a plurality of partitions, each of the walls having a separate partition coupled thereto, the virtual electrode unit defining a plurality of virtual electrodes, with a separate virtual electrode in fluid communication with each of the electrode compartments when the second field shaping unit replaces the first field shaping unit;    a relative arrangement of the virtual electrodes of the second replaceable field shaping unit being different from a relative arrangement of the virtual electrodes of the first field shaping unit, thereby facilitating adaptation of the electrochemical processing chamber for use with the differently-sized workpiece.    
     
     
         50 . The electrochemical processing chamber of  claim 48  further comprising a flow distributor having a plurality of fluid conduits, with one fluid conduit being in fluid communication with each of the electrode compartments.  
     
     
         51 . The electrochemical processing chamber of  claim 50  wherein each of the walls has a lower edge releasably received in a separate annular recess in the flow distributor.  
     
     
         52 . An electrochemical processing system, comprising: 
 a reaction vessel having an outer wall and a plurality of concentric, annular electrodes, adjacent electrodes being spaced from one another to define annular wall-receiving spaces therebetween;    a replaceable first field shaping unit comprising:    a plurality of concentric walls formed of a dielectric material and having upper edges, the walls being positioned with respect to one another to be received in the wall-receiving spaces between the electrodes to define a plurality of concentric electrode compartments with at least one of the electrodes being received within each of the electrode compartments; and    a first virtual electrode unit formed of a dielectric material and coupled to the walls adjacent their upper edges, the first virtual electrode unit being adapted to abut the outer wall of the reaction vessel, the first virtual electrode unit defining a first set of discharge openings having predefined relative positions, each of the discharge openings of the first set being adapted for fluid communication with one of the electrode compartments, each discharge opening of the first set defining a position of a virtual electrode; and    a replaceable second field shaping unit comprising:    a plurality of concentric walls formed of a dielectric material and having upper edges, the walls being positioned with respect to one another to be received in the wall-receiving spaces between the electrodes to define a plurality of concentric electrode compartments with at least one of the electrodes being received within each of the electrode compartments; and    a second virtual electrode unit formed of a dielectric material and coupled to the walls adjacent their upper edges, the second virtual electrode unit being adapted to abut the outer wall of the reaction vessel, the second virtual electrode unit defining a second set of discharge openings having predefined relative positions, the relative positions of the discharge openings of the second set differing from the relative positions of the discharge openings of the first set, each of the discharge openings of the second set being adapted for fluid communication with one of the electrode compartments, each discharge opening of the second set defining a position of an virtual electrode;    the first field shaping unit and the second field shaping unit each being adapted for installation in and removal from the reaction vessel as a unit.    
     
     
         53 . The electrochemical processing chamber of  claim 52  wherein the reaction vessel further comprises a flow distributor adapted to deliver processing fluid to each of the electrode compartments defined when the first field shaping unit or the second field shaping unit is installed in the reaction vessel.  
     
     
         54 . The electrochemical processing chamber of  claim 53  wherein the flow distributor includes a plurality of spaced-apart annular recesses, each of the walls of each of the field shaping units having a lower edge sized to be releasably received in one of the annular recesses when the field shaping unit is installed in the reaction vessel.  
     
     
         55 . The electrochemical processing chamber of  claim 53  further comprising a first contact assembly adapted to support a first workpiece above the electrodes in a predefined position with respect to the virtual electrodes of the first field shaping unit.  
     
     
         56 . The electrochemical processing chamber of  claim 55  further comprising a second contact assembly adapted to support a second workpiece above the electrodes in a predefined position with respect to the virtual electrodes of the second field shaping unit.  
     
     
         57 . An electrochemical processing chamber, comprising: 
 a reaction vessel having an interior;    an electrode received in the interior of the reaction vessel;    a first virtual electrode unit comprising a dielectric material and defining a first virtual electrode in fluid communication with the electrode; and    a first contact assembly adapted to support workpiece in a predetermined position with respect to the first virtual electrode;    the first contact assembly being exchangeable for a second contact assembly and the first virtual electrode unit being exchangeable for a second virtual electrode unit, without necessitating modification of the electrode, to adapt the processing chamber for treating a differently-sized workpiece.