Inventor · disambiguated record
Randy Harris
Also filed as: HARRIS RANDY · HARRIS RANDY A
42 granted patents·18 pending applications·506 citations·filing 2000–2024
98Inventor score
Files withSEMITOOL INC22APPLIED MATERIALS INC21HARRIS RANDY A4GENWORTH FINANCIAL INC2DISCUS Software Company1
Top patents by PatentIndex Score
60 records- 0197US10203604B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2016·Granted Feb 12, 2019·16 cites·16 claims
- 0292US7371998B2Thermal wafer processorSEMITOOL INC·Filed 2006·Granted May 13, 2008·20 cites·19 claims
- 0391US10474033B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2017·Granted Nov 12, 2019·4 cites·18 claims
- 0491US7371306B2Integrated tool with interchangeable wet processing components for processing microfeature workpiecesSEMITOOL INC·Filed 2004·Granted May 13, 2008·42 cites·32 claims
- 0590US10174437B2Wafer electroplating chuck assemblyAPPLIED MATERIALS INC·Filed 2016·Granted Jan 8, 2019·3 cites·16 claims
- 0690US7520286B2Apparatus and method for cleaning and drying a container for semiconductor workpiecesSEMITOOL INC·Filed 2005·Granted Apr 21, 2009·16 cites·35 claims
- 0789US11112697B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·3 cites·10 claims
- 0888US8968533B2Electroplating processor with geometric electrolyte flow pathHARRIS RANDY A·Filed 2012·Granted Mar 3, 2015·4 cites·15 claims
- 0988US6752584B2Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpiecesSEMITOOL INC·Filed 2001·Granted Jun 22, 2004·39 cites·16 claims
- 1087US6623609B2Lift and rotate assembly for use in a workpiece processing station and a method of attaching the sameSEMITOOL INC·Filed 2001·Granted Sep 23, 2003·39 cites·42 claims
- 1186US6921467B2Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpiecesSEMITOOL INC·Filed 2001·Granted Jul 26, 2005·37 cites·44 claims
- 1286US6916412B2Adaptable electrochemical processing chamberSEMITOOL INC·Filed 2001·Granted Jul 12, 2005·35 cites·20 claims
- 1385US6991710B2Apparatus for manually and automatically processing microelectronic workpiecesSEMITOOL INC·Filed 2002·Granted Jan 31, 2006·34 cites·15 claims
- 1482US2025341018A1Gas atomized fluid clean of electroplating chuck in maintenance chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1581US2025341017A1Gas atomized fluid clean of electroplating chuck in maintenance chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1680US7849865B2System for processing a workpieceSEMITOOL INC·Filed 2007·Granted Dec 14, 2010·6 cites·16 claims
- 1779US9812344B2Wafer processing system with chuck assembly maintenance moduleAPPLIED MATERIALS INC·Filed 2015·Granted Nov 7, 2017·3 cites·18 claims
- 1879US7334826B2End-effectors for handling microelectronic wafersSEMITOOL INC·Filed 2002·Granted Feb 26, 2008·24 cites·9 claims
- 1979US6749391B2Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpiecesSEMITOOL INC·Filed 2002·Granted Jun 15, 2004·22 cites·3 claims
- 2079US6439824B1Automated semiconductor immersion processing systemSEMITOOL INC·Filed 2000·Granted Aug 27, 2002·20 cites·15 claims
- 2177US11899366B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2021·Granted Feb 13, 2024·0 cites·10 claims
- 2276US6900132B2Single workpiece processing systemSEMITOOL INC·Filed 2003·Granted May 31, 2005·22 cites·26 claims
- 2376US6749390B2Integrated tools with transfer devices for handling microelectronic workpiecesSEMITOOL INC·Filed 2001·Granted Jun 15, 2004·19 cites·11 claims
- 2475US12476120B2Modular mainframe layout for supporting multiple semiconductor process modules or chambersAPPLIED MATERIALS INC·Filed 2024·Granted Nov 18, 2025·0 cites·20 claims
- 2575US8900425B2Contact ring for an electrochemical processorHARRIS RANDY A·Filed 2011·Granted Dec 2, 2014·1 cites·15 claims
- 2673US7934898B2High throughput semiconductor wafer processingSEMITOOL INC·Filed 2007·Granted May 3, 2011·4 cites·8 claims
- 2772US7333223B2System and method for electronically delivering documentsGENWORTH FINANCIAL INC·Filed 2001·Granted Feb 19, 2008·21 cites·14 claims
- 2872US6575689B2Automated semiconductor immersion processing systemSEMITOOL INC·Filed 2002·Granted Jun 10, 2003·12 cites·25 claims
- 2971US7281741B2End-effectors for handling microelectronic workpiecesSEMITOOL INC·Filed 2002·Granted Oct 16, 2007·12 cites·26 claims
- 3071US7198694B2Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systemsSEMITOOL INC·Filed 2004·Granted Apr 3, 2007·16 cites·29 claims
- 3171US6799150B2System and method for monitoring information delivered through an electronic delivery systemGE FINANCIAL ASSURANCE HOLDING·Filed 2001·Granted Sep 28, 2004·6 cites·20 claims
- 3269US10373864B2Systems and methods for wetting substratesAPPLIED MATERIALS INC·Filed 2017·Granted Aug 6, 2019·1 cites·19 claims
- 3368US2015075976A1Electroplating processor with geometric electrolyte flow pathAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3467US2025116028A1Electroplating chamber using jet array to enable high mass-transferAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3566US9399827B2Microelectronic substrate electro processing systemAPPLIED MATERIALS INC·Filed 2014·Granted Jul 26, 2016·1 cites·16 claims
- 3666US7277195B2System and method for monitoring information delivered through an electronic delivery systemGENWORTH FINANCIAL INC·Filed 2004·Granted Oct 2, 2007·1 cites·22 claims
- 3766US7114903B2Apparatuses and method for transferring and/or pre-processing microelectronic workpiecesSEMITOOL INC·Filed 2003·Granted Oct 3, 2006·10 cites·42 claims
- 3865US11935771B2Modular mainframe layout for supporting multiple semiconductor process modules or chambersAPPLIED MATERIALS INC·Filed 2021·Granted Mar 19, 2024·0 cites·20 claims
- 3963US6878955B2Method and apparatus for accessing microelectronic workpiece containersSEMITOOL INC·Filed 2004·Granted Apr 12, 2005·7 cites·24 claims
- 4060US10837119B2Microelectronic substrate electro processing systemAPPLIED MATERIALS INC·Filed 2018·Granted Nov 17, 2020·0 cites·13 claims
- 4160US6717171B2Method and apparatus for accessing microelectronic workpiece containersSEMITOOL INC·Filed 2001·Granted Apr 6, 2004·6 cites·49 claims
- 4258US2025336664A1Gas atomized prewetting chamber and cleaning system and methodAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4357US9598788B2Electroplating apparatus with contact ring deplatingAPPLIED MATERIALS INC·Filed 2013·Granted Mar 21, 2017·0 cites·20 claims
- 4456US10087544B2Microelectronic substrate electro processing systemAPPLIED MATERIALS INC·Filed 2016·Granted Oct 2, 2018·0 cites·20 claims
- 4553US2014262795A1Electroplating processor with vacuum rotorAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 4649US2007104559A1End-effectors for handling microelectronic workpiecesWOODRUFF DANIEL J·Filed 2006·Application pending·0 cites
- 4745US11935770B2Modular mainframe layout for supporting multiple semiconductor process modules or chambersAPPLIED MATERIALS INC·Filed 2021·Granted Mar 19, 2024·0 cites·20 claims
- 4845US2009022574A1Workpiece loading systemEUDY STEVE L·Filed 2007·Application pending·0 cites
- 4945US2006037855A1Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpiecesHANSON KYLE M·Filed 2005·Application pending·0 cites
- 5045US2005155864A1Adaptable electrochemical processing chamberFiled 2005·Application pending·0 cites
Showing the top 50 of 60 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →