End-effectors for handling microelectronic workpieces

Abstract

End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.

1 - 27 . (canceled)  
   
   
       28 . An end-effector for handling a microelectronic workpiece, comprising: 
 a body;    a resilient compressive member carried by the body and having a first abutment at one end thereof;    a tensile member carried by the body and having a second abutment at one end thereof, the second abutment being spaced from the first abutment to receive a workpiece therebetween; and    an actuator coupled to the compressive member and the tensile member, the actuator being adapted to move the first abutment and the second abutment relative to the body and to selectively grasp a workpiece by compressing the compressive member against the workpiece and placing the tensile member under tension, the compressive member resiliently deforming when the actuator urges the first abutment against the workpiece.    
   
   
       29 . An end-effector for handling a microelectronic workpiece, comprising: 
 a body;    first and second resilient members carried by the body, the first resilient member carrying a first abutment and the second resilient member carrying a second abutment spaced from the first abutment;    a third abutment carried by the body and having a fixed position with respect to the body;    a fourth abutment carried by the body and having a fixed position with respect to the body that is spaced from the third abutment; and    an actuator carried by the body and coupled to the first and second resilient members, the actuator being adapted to move the first and second abutments to selectively grasp or release a workpiece between the first, second, third, and fourth abutments.    
   
   
       30 - 36 . (canceled)  
   
   
       37 . The end-effector of  claim 29  wherein the first and fourth abutments define a first antipodal pair of abutments and the second and third abutments define a second antipodal pair of abutments.  
   
   
       38 . An end-effector for handling a microelectronic workpiece, comprising: 
 a body carrying a first abutment, a second abutment, a third abutment, and a fourth abutment, the abutments being spaced from one another to define a workpiece-receiving area therebetween; and    an actuator resiliently connected to the first and second abutments and connected to the third and fourth abutments, the actuator being adapted to urge each of the abutments inwardly toward the workpiece-receiving area to grip a workpiece received therein.    
   
   
       39 . The end-effector of  claim 38  wherein the first and fourth abutments define a first antipodal pair of abutments and the second and third abutments define a second antipodal pair of abutments.  
   
   
       40 . The end-effector of  claim 38  wherein the first abutment is coupled to the actuator by a resilient first rod, the second abutment is coupled to the actuator by a resilient second rod, the third abutment is coupled to the actuator by a third rod, and the fourth abutment is coupled to the actuator by a fourth rod.  
   
   
       41 . The end-effector of  claim 40  wherein the actuator includes first and second rotatable members, the first and third rods being coupled to the first rotatable member and the second and fourth rods being coupled to the second rotatable member.  
   
   
       42 . The end-effector of  claim 41  wherein the first rotatable member has a first rotational axis, the first rod being coupled to the first rotatable member radially outwardly of the first rotational axis, and the fourth rod being coupled to the first rotatable member radially outwardly of the first rotational axis at a location spaced from the first rod.  
   
   
       43 . The end-effector of  claim 42  wherein the second rotatable member has a second rotational axis, the second rod being coupled to the second rotatable member radially outwardly of the second rotational axis, and the third rod being coupled to the second rotatable member radially outwardly of the second rotational axis at a location spaced from the first rod.  
   
   
       44 . The end-effector of  claim 38  wherein the first abutment is coupled to the actuator by a resilient first rod and the second abutment is coupled to the actuator by a resilient second rod.  
   
   
       45 . The end-effector of  claim 44  wherein the first rod is adapted for movement by the actuator inwardly from a retracted position, the first rod in its retracted position being bent from a relaxed shape.  
   
   
       46 . The end-effector of  claim 45  wherein the first rod is adapted to bend further when urged against an edge of the workpiece.  
   
   
       47 . The end-effector of  claim 45  wherein the second rod is adapted for movement by the actuator inwardly from a retracted position, the second rod in its retracted position being bent from a relaxed shape.  
   
   
       48 . The end-effector of  claim 47  wherein the second rod is adapted to bend further when urged against an edge of the workpiece.  
   
   
       49 . An end-effector for handling a microelectronic workpiece, comprising: 
 a body carrying a first channel, a second channel, a first abutment, a second abutment, a third abutment, and a fourth abutment;    an actuator;    a first resilient member coupling the first abutment to the actuator, the first resilient member being slidably received in the first channel; and    a second resilient member coupling the second abutment to the actuator, the second resilient member being slidably received in the second channel, the first channel being spaced apart from the second channel.    
   
   
       50 . (canceled)  
   
   
       51 . The end-effector of  claim 49  wherein the second resilient member has a relaxed shape and the second abutment is moveable between a retracted position and a workpiece-engaging position, the second channel being configured so that when the second resilient member is received by the second channel the second resilient member is deflected away from the relaxed shape when the second abutment is in the retracted position.  
   
   
       52 . The end-effector of  claim 49  wherein the actuator comprises first and second rotatable members, the first resilient member being coupled to the first rotatable member and the second resilient member being coupled to the second rotatable member.  
   
   
       53 . The end-effector of  claim 49  further comprising a third member coupling the third abutment to the actuator and a fourth member coupling the fourth abutment to the actuator.  
   
   
       54 - 61 . (canceled)  
   
   
       57 . A transfer device for handling microelectronic workpieces, comprising: 
 a transport unit configured to move along a transport path;    a lift assembly carried by the transport unit;    an arm carried by the lift assembly; and    a first end-effector rotatably coupled to the arm, the first end-effector comprising: 
 a body carrying a first channel, a second channel, a first abutment, a second abutment, a third abutment, and a fourth abutment;  
 an actuator;  
 a first resilient member coupling the first abutment to the actuator, the first resilient member being slidably received in the first channel; and  
 a second resilient member coupling the second abutment to the actuator, the second resilient member being slidably received in the second channel, the first channel being spaced apart from the second channel.  
   
   
   
       58 . (canceled)