Inventor · disambiguated record
Thomas H. Oberlitner
Also filed as: OBERLITNER THOMAS · OBERLITNER THOMAS H
24 granted patents·4 pending applications·1,125 citations·filing 1993–2023
97Inventor score
Top patents by PatentIndex Score
28 records- 0194US6547937B1Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpieceSEMITOOL INC·Filed 2000·Granted Apr 15, 2003·61 cites·34 claims
- 0294US6318951B1Robots for microelectronic workpiece handlingSEMITOOL INC·Filed 1999·Granted Nov 20, 2001·180 cites·21 claims
- 0394US6309520B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Oct 30, 2001·92 cites·61 claims
- 0493US6309524B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Oct 30, 2001·107 cites·39 claims
- 0590US5658387ASemiconductor processing spray coating apparatusSEMITOOL INC·Filed 1995·Granted Aug 19, 1997·108 cites·24 claims
- 0690US5489341ASemiconductor processing with non-jetting fluid stream discharge arraySEMITOOL INC·Filed 1993·Granted Feb 6, 1996·116 cites·26 claims
- 0789US6699373B2Apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Mar 2, 2004·40 cites·42 claims
- 0888US6773559B2Processing apparatus including a reactor for electrochemically etching a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Aug 10, 2004·32 cites·12 claims
- 0987US7138016B2Semiconductor processing apparatusSEMITOOL INC·Filed 2001·Granted Nov 21, 2006·31 cites·109 claims
- 1087US6869510B2Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Mar 22, 2005·26 cites·21 claims
- 1187US6303010B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Oct 16, 2001·81 cites·8 claims
- 1284US7294244B2Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpieceSEMITOOL INC·Filed 2003·Granted Nov 13, 2007·20 cites·29 claims
- 1383US5584310ASemiconductor processing with non-jetting fluid stream discharge arraySEMITOOL INC·Filed 1995·Granted Dec 17, 1996·62 cites·45 claims
- 1482US6375741B2Semiconductor processing spray coating apparatusFiled 2000·Granted Apr 23, 2002·23 cites·50 claims
- 1582US6322119B1Robots for microelectronic workpiece handlingSEMITOOL INC·Filed 1999·Granted Nov 27, 2001·65 cites·16 claims
- 1678US11739434B2Plating systems having reduced air entrainmentAPPLIED MATERIALS INC·Filed 2020·Granted Aug 29, 2023·1 cites·14 claims
- 1775US6645356B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Nov 11, 2003·28 cites·56 claims
- 1874US12312702B2Plating systems having reduced air entrainmentAPPLIED MATERIALS INC·Filed 2023·Granted May 27, 2025·0 cites·14 claims
- 1971US7281741B2End-effectors for handling microelectronic workpiecesSEMITOOL INC·Filed 2002·Granted Oct 16, 2007·12 cites·26 claims
- 2069US10373864B2Systems and methods for wetting substratesAPPLIED MATERIALS INC·Filed 2017·Granted Aug 6, 2019·1 cites·19 claims
- 2169US6066575ASemiconductor processing spray coating apparatusSEMITOOL INC·Filed 1997·Granted May 23, 2000·34 cites·28 claims
- 2260US7094291B2Semiconductor processing apparatusSEMITOOL INC·Filed 2001·Granted Aug 22, 2006·5 cites·54 claims
- 2356US2008110751A1Microelectronic Workpiece Processing Tool Including A Processing Reactor Having A Paddle Assembly for Agitation of a Processing Fluid Proximate to the WorkpieceSEMITOOL INC·Filed 2007·Application pending·0 cites
- 2451US2005189213A1Method and apparatus for copper plating using electroless plating and electroplatingFiled 2005·Application pending·0 cites
- 2549US2007104559A1End-effectors for handling microelectronic workpiecesWOODRUFF DANIEL J·Filed 2006·Application pending·0 cites
- 2647US9469913B2Closed loop electrolyte analyzerAPPLIED MATERIALS INC·Filed 2014·Granted Oct 18, 2016·0 cites·12 claims
- 2743US7524406B2Processing apparatus including a reactor for electrochemically etching microelectronic workpieceSEMITOOL INC·Filed 2003·Granted Apr 28, 2009·0 cites·15 claims
- 2835US2003198551A1Robots for microelectronic workpiece handlingFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →