Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces

Abstract

Processing tools, components of tools, and methods of making and using such devices for electrochemical processing of microelectronic workpieces. One aspect of the invention is directed toward reaction vessels for electrochemical processing of microelectronic workpieces, processing stations including such reaction vessels, and methods for using these devices. For example, one embodiment of a reaction vessel includes an outer container having an outer wall, a first outlet configured to introduce a primary fluid flow into the outer container, and at least one second outlet configured to introduce a secondary fluid flow into the outer container separate from the primary fluid flow. The reaction vessel can also include at least one electrode, and it can also have a field shaping unit. The field shaping unit, for example, can be a dielectric assembly coupled to the second outlet to receive the secondary flow and configured to contain the secondary flow separate from the primary flow through at least a portion of the outer container. The field shaping unit can also have at least one electrode compartment through which the secondary flow can pass separately from the primary flow. The electrode is positioned in the electrode compartment.

1 . A tool for electrochemical processing of microelectronic workpieces, comprising: 
 a cabinet defining an interior enclosure;    an electrochemical processing station comprising—
 (a) a reaction vessel in the interior enclosure, the reaction vessel comprising a container and a plurality of separate electrodes in the container, and  
 (b) a head assembly having a workpiece holder configured to hold a microelectronic workpiece relative to the reaction vessel during a processing cycle; and  
   a transfer device for handling workpieces in the cabinet, the transfer device having a robot comprising—
 (a) an arm assembly including an arm that moves along a lift path and/or rotates about the lift path, and  
 (c) at least a first end-effector carried by the arm, wherein the first end-effector rotates relative to the arm.  
   
     
     
         2 - 11 . (canceled)