Inventor · disambiguated record
Gregory J. Wilson
Also filed as: WILSON GREGORY · WILSON GREGORY J · WILSON GREGORY JAMES
100 granted patents·52 pending applications·1,332 citations·filing 1992–2025
99Inventor score
Top patents by PatentIndex Score
152 records- 0199US6565729B2Method for electrochemically depositing metal on a semiconductor workpieceSEMITOOL INC·Filed 2000·Granted May 20, 2003·435 cites·59 claims
- 0298US6428673B1Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrologySEMITOOL INC·Filed 2000·Granted Aug 6, 2002·102 cites·17 claims
- 0396US11230793B2Mechanically-driven oscillating flow agitationAPPLIED MATERIALS INC·Filed 2020·Granted Jan 25, 2022·2 cites·10 claims
- 0496US10227706B2Electroplating apparatus with electrolyte agitationAPPLIED MATERIALS INC·Filed 2015·Granted Mar 12, 2019·6 cites·19 claims
- 0596US9765443B2Electroplating processor with current thief electrodeAPPLIED MATERIALS INC·Filed 2015·Granted Sep 19, 2017·6 cites·17 claims
- 0696US6569297B2Workpiece processor having processing chamber with improved processing fluid flowSEMITOOL INC·Filed 2001·Granted May 27, 2003·39 cites·52 claims
- 0795US11585009B2Mechanically-driven oscillating flow agitationAPPLIED MATERIALS INC·Filed 2022·Granted Feb 21, 2023·1 cites·18 claims
- 0895US10577712B2Electroplating apparatus with electrolyte agitationAPPLIED MATERIALS INC·Filed 2019·Granted Mar 3, 2020·3 cites·19 claims
- 0995US9958782B2Apparatus for post exposure bakeAPPLIED MATERIALS INC·Filed 2016·Granted May 1, 2018·9 cites·20 claims
- 1095US7931786B2Apparatus and method for agitating liquids in wet chemical processing of microfeature workpiecesSEMITOOL INC·Filed 2006·Granted Apr 26, 2011·18 cites·25 claims
- 1194US10232413B2Controlled fluid flow for cleaning an optical elementASML NETHERLANDS BV·Filed 2017·Granted Mar 19, 2019·8 cites·20 claims
- 1294US9920448B2Inert anode electroplating processor and replenisher with anionic membranesAPPLIED MATERIALS INC·Filed 2015·Granted Mar 20, 2018·4 cites·20 claims
- 1394US8496775B2Method for embossing an absorbent articleDENG RONG·Filed 2010·Granted Jul 30, 2013·44 cites·23 claims
- 1494US8496789B2Electrochemical processorMCHUGH PAUL R·Filed 2011·Granted Jul 30, 2013·9 cites·20 claims
- 1594US7332066B2Apparatus and method for electrochemically depositing metal on a semiconductor workpieceSEMITOOL INC·Filed 2005·Granted Feb 19, 2008·19 cites·38 claims
- 1693US12116686B2Parameter adjustment model for semiconductor processing chambersAPPLIED MATERIALS INC·Filed 2022·Granted Oct 15, 2024·2 cites·17 claims
- 1793US9758897B2Electroplating apparatus with notch adapted contact ring seal and thief electrodeAPPLIED MATERIALS INC·Filed 2015·Granted Sep 12, 2017·3 cites·8 claims
- 1893US7842173B2Apparatus and methods for electrochemical processing of microfeature wafersSEMITOOL INC·Filed 2007·Granted Nov 30, 2010·9 cites·24 claims
- 1993US6660137B2System for electrochemically processing a workpieceSEMITOOL INC·Filed 2001·Granted Dec 9, 2003·78 cites·18 claims
- 2093US6471913B1Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperatureSEMITOOL INC·Filed 2000·Granted Oct 29, 2002·66 cites·22 claims
- 2192US11550224B2Apparatus for post exposure bakeAPPLIED MATERIALS INC·Filed 2020·Granted Jan 10, 2023·2 cites·20 claims
- 2292US8496790B2Electrochemical processorWILSON GREGORY J·Filed 2011·Granted Jul 30, 2013·13 cites·12 claims
- 2392US7857958B2Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpiecesSEMITOOL INC·Filed 2007·Granted Dec 28, 2010·17 cites·23 claims
- 2492US7371998B2Thermal wafer processorSEMITOOL INC·Filed 2006·Granted May 13, 2008·20 cites·19 claims
- 2591US7160421B2Turning electrodes used in a reactor for electrochemically processing a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Jan 9, 2007·24 cites·32 claims
- 2690US12104269B2Mechanically-driven oscillating flow agitationAPPLIED MATERIALS INC·Filed 2023·Granted Oct 1, 2024·0 cites·20 claims
- 2790US11705312B2Vertically adjustable plasma sourceAPPLIED MATERIALS INC·Filed 2020·Granted Jul 18, 2023·2 cites·13 claims
- 2889US9557650B2Transport system for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2015·Granted Jan 31, 2017·5 cites·29 claims
- 2989US7189318B2Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Mar 13, 2007·16 cites·22 claims
- 3088US8968533B2Electroplating processor with geometric electrolyte flow pathHARRIS RANDY A·Filed 2012·Granted Mar 3, 2015·4 cites·15 claims
- 3188US8313631B2Apparatus and methods for electrochemical processing of microfeature wafersMCHUGH PAUL R·Filed 2010·Granted Nov 20, 2012·3 cites·11 claims
- 3286US6921467B2Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpiecesSEMITOOL INC·Filed 2001·Granted Jul 26, 2005·37 cites·44 claims
- 3385US9222195B2Electroplating systems and methods for high sheet resistance substratesMCHUGH PAUL R·Filed 2012·Granted Dec 29, 2015·3 cites·7 claims
- 3484US11982008B2Electroplating systemAPPLIED MATERIALS INC·Filed 2023·Granted May 14, 2024·0 cites·5 claims
- 3584US9994376B2Package comprising a plurality of individually wrapped articlesPROCTER & GAMBLE·Filed 2014·Granted Jun 12, 2018·12 cites·20 claims
- 3684US8808888B2Flow battery systemsWILSON GREGORY J·Filed 2010·Granted Aug 19, 2014·4 cites·13 claims
- 3784US7267749B2Workpiece processor having processing chamber with improved processing fluid flowSEMITOOL INC·Filed 2003·Granted Sep 11, 2007·10 cites·32 claims
- 3884US7247223B2Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpiecesSEMITOOL INC·Filed 2003·Granted Jul 24, 2007·25 cites·44 claims
- 3983US10655226B2Apparatus and methods to improve ALD uniformityAPPLIED MATERIALS INC·Filed 2018·Granted May 19, 2020·1 cites·19 claims
- 4083US10494731B2Electroplating dynamic edge controlAPPLIED MATERIALS INC·Filed 2017·Granted Dec 3, 2019·3 cites·18 claims
- 4183US10113245B2Electroplating contact ring with radially offset contact fingersAPPLIED MATERIALS INC·Filed 2017·Granted Oct 30, 2018·3 cites·6 claims
- 4282US9099297B2Electrochemical processorAPPLIED MATERIALS INC·Filed 2013·Granted Aug 4, 2015·4 cites·12 claims
- 4382US8968531B2Electro processor with shielded contact ringWILSON GREGORY J·Filed 2011·Granted Mar 3, 2015·2 cites·16 claims
- 4482US8491742B2Method for embossing an absorbent article using a segmented anvilWAAS STEVE J·Filed 2010·Granted Jul 23, 2013·40 cites·23 claims
- 4582US2025341018A1Gas atomized fluid clean of electroplating chuck in maintenance chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4681US12288677B2Vertically adjustable plasma sourceAPPLIED MATERIALS INC·Filed 2023·Granted Apr 29, 2025·0 cites·20 claims
- 4781US10240248B2Adaptive electric field shielding in an electroplating processor using agitator geometry and motion controlAPPLIED MATERIALS INC·Filed 2016·Granted Mar 26, 2019·1 cites·9 claims
- 4881US2025341017A1Gas atomized fluid clean of electroplating chuck in maintenance chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4980US11578422B2Electroplating systemAPPLIED MATERIALS INC·Filed 2022·Granted Feb 14, 2023·0 cites·17 claims
- 5080US7438788B2Apparatus and methods for electrochemical processing of microelectronic workpiecesSEMITOOL INC·Filed 2005·Granted Oct 21, 2008·2 cites·14 claims
Showing the top 50 of 152 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →