Inventor · disambiguated record
Steve Eudy
Also filed as: EUDY STEVE · EUDY STEVE L
12 granted patents·6 pending applications·301 citations·filing 2000–2007
92Inventor score
Top patents by PatentIndex Score
18 records- 0198US6428673B1Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrologySEMITOOL INC·Filed 2000·Granted Aug 6, 2002·102 cites·17 claims
- 0288US6773559B2Processing apparatus including a reactor for electrochemically etching a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Aug 10, 2004·32 cites·12 claims
- 0386US6921467B2Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpiecesSEMITOOL INC·Filed 2001·Granted Jul 26, 2005·37 cites·44 claims
- 0486US6916412B2Adaptable electrochemical processing chamberSEMITOOL INC·Filed 2001·Granted Jul 12, 2005·35 cites·20 claims
- 0580US6747734B1Apparatus and method for processing a microelectronic workpiece using metrologySEMITOOL INC·Filed 2000·Granted Jun 8, 2004·21 cites·48 claims
- 0678US7102763B2Methods and apparatus for processing microelectronic workpieces using metrologySEMITOOL INC·Filed 2001·Granted Sep 5, 2006·22 cites·69 claims
- 0775US6632334B2Distributed power supplies for microelectronic workpiece processing toolsSEMITOOL INC·Filed 2001·Granted Oct 14, 2003·24 cites·53 claims
- 0873US7934898B2High throughput semiconductor wafer processingSEMITOOL INC·Filed 2007·Granted May 3, 2011·4 cites·8 claims
- 0971US7161689B2Apparatus and method for processing a microelectronic workpiece using metrologySEMITOOL INC·Filed 2003·Granted Jan 9, 2007·12 cites·17 claims
- 1065US7294243B2Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereofSEMITOOL INC·Filed 2002·Granted Nov 13, 2007·4 cites·6 claims
- 1162US6962649B2Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpiecesSEMITOOL INC·Filed 2001·Granted Nov 8, 2005·8 cites·44 claims
- 1249US2003066752A1Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processes based on metrologyFiled 2002·Application pending·0 cites
- 1345US2009022574A1Workpiece loading systemEUDY STEVE L·Filed 2007·Application pending·0 cites
- 1445US2006037855A1Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpiecesHANSON KYLE M·Filed 2005·Application pending·0 cites
- 1545US2005155864A1Adaptable electrochemical processing chamberFiled 2005·Application pending·0 cites
- 1643US7524406B2Processing apparatus including a reactor for electrochemically etching microelectronic workpieceSEMITOOL INC·Filed 2003·Granted Apr 28, 2009·0 cites·15 claims
- 1743US2006226019A1Die-level wafer contact for direct-on-barrier platingSEMITOOL INC·Filed 2006·Application pending·0 cites
- 1836US2003136431A1Method and apparatus for cleaning of microelectronic workpieces after chemical-mechanical planarizationSEMITOOL INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →