Electronic device manufacturing chamber and methods of forming the same

Abstract

In a first aspect, a first multi-piece chamber is provided. The first multi-piece chamber includes (1) a central piece having a first side and a second side; (2) a first side piece adapted to couple with the first side of the central piece; and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece and the second side piece form a substantially cylindrical inner chamber region when coupled together. The pieces may each include openings in the top of the pieces and flat mounting surfaces for coupling the pieces together. Numerous other aspects are provided.

1 . A multi-piece chamber comprising: 
 a central piece having a first side and a second side;    a first side piece adapted to couple with the first side of the central piece; and    a second side piece adapted to couple with the second side of the central piece;    wherein the central piece, the first side piece and the second side piece form a substantially cylindrical inner chamber region when coupled together, and    wherein the first side piece includes a top portion having at least one opening.    
   
   
       2 . The multi-piece chamber of  claim 1  wherein central piece, the first side piece and the second side piece form a transfer chamber when coupled together.  
   
   
       3 . The multi-piece chamber of  claim 1  wherein the central piece has a substantially rectangular shape.  
   
   
       4 . The multi-piece chamber of  claim 1  wherein the central piece has a length of about 3 meters or greater.  
   
   
       5 . The multi-piece chamber of  claim 4  wherein the central piece has a width of about 2.4 meters or greater.  
   
   
       6 . The multi-piece chamber of  claim 1  wherein the central piece includes a bottom having a domed portion.  
   
   
       7 . The multi-piece chamber of  claim 6  wherein the domed portion is adapted to accommodate a vacuum robot.  
   
   
       8 . The multi-piece chamber of  claim 6  wherein the domed portion includes at least one support fin adapted to reduce movement of the domed portion in a vertical direction.  
   
   
       9 . The multi-piece chamber of  claim 8  wherein the domed portion includes a plurality of support fins, each support fin adapted to reduce movement of the domed portion in a vertical direction.  
   
   
       10 . The multi-piece chamber of  claim 6  wherein the bottom of the central piece includes a flat portion.  
   
   
       11 . The multi-piece chamber of  claim 10  wherein the flat portion has a first thickness and the domed portion has a second thickness that is less than the first thickness.  
   
   
       12 . The multi-piece chamber of  claim 11  wherein the first thickness is about 0.75 to 1.0 inches or less and the second thickness is about 0.375 inches or less.  
   
   
       13 . The multi-piece chamber of  claim 11  wherein both the flat portion and domed portion are formed from stainless steel.  
   
   
       14 . The multi-piece chamber of  claim 1  wherein the central piece has a first facet and a second facet, and wherein: 
 the first facet includes at least one opening sized to allow a substrate to pass through the opening; and    the second facet includes at least two openings each sized to allow a substrate to pass through the opening.    
   
   
       15 . The multi-piece chamber of  claim 14  wherein the second facet includes at least three openings each sized to allow a substrate to pass through the opening.  
   
   
       16 . The multi-piece chamber of  claim 14  wherein the first facet is adapted to sealingly couple to a processing chamber.  
   
   
       17 . The multi-piece chamber of  claim 16  wherein the second facet is adapted to sealingly couple to a load lock chamber.  
   
   
       18 . The multi-piece chamber of  claim 17  wherein the second facet is adapted to sealingly to couple to a load lock chamber that stores at least three substrates stacked vertically, and wherein the second facet has: 
 a first opening sized to allow a substrate to pass between the central piece and the load lock chamber at a first elevation;    a second opening sized to allow a substrate to pass between the central piece and the load lock chamber at a second elevation; and    a third opening sized to allow a substrate to pass between the central piece and the load lock chamber at a third elevation.    
   
   
       19 . The multi-piece chamber of  claim 18  wherein: 
 the first side piece includes at least a first facet having an opening sized to allow a substrate to pass through the opening;    the second side piece includes at least a first facet having an opening sized to allow a substrate to pass through the opening; and    the opening of the first facet of the first side piece, the opening of the first facet of the second side piece and the first opening of the second facet of the central piece are at substantially the same elevation when the first side piece, the second side piece and the central piece are coupled together.    
   
   
       20 . The multi-piece chamber of  claim 1  wherein the first side of the central piece includes at least a first notch adapted to allow a substrate to be rotated within the multi-piece chamber and to be transferred from the multi-piece chamber to a chamber coupled to the first side piece of the multi-piece chamber.  
   
   
       21 . The multi-piece chamber of  claim 20  wherein the second side of the central piece includes at least a first notch adapted to allow a substrate to be rotated within the multi-piece chamber and to be transferred from the multi-piece chamber to a chamber coupled to the second side piece of the multi-piece chamber.  
   
   
       22 . The multi-piece chamber of  claim 1  wherein the first side piece and the second side piece have a first width, and the central piece has a second width that is approximately twice the first width or greater.  
   
   
       23 . The multi-piece chamber of  claim 1  wherein the first side piece comprises a substantially cylindrical side wall having a plurality of flat facets formed in the side wall.  
   
   
       24 . The multi-piece chamber of  claim 23  wherein the first side piece includes two facets, each having an opening sized to allow a substrate to pass through the opening.  
   
   
       25 . The multi-piece chamber of  claim 23  wherein the first side piece includes at least one fin structure adapted to reduce movement of the side wall of the first side piece.  
   
   
       26 . The multi-piece chamber of  claim 25  wherein the first side piece includes a plurality of fin structures adapted to reduce movement of the side wall of the first side piece.  
   
   
       27 . The multi-piece chamber of  claim 1  wherein the second side piece comprises a substantially cylindrical side wall having a plurality of flat facets formed in the side wall.  
   
   
       28 . The multi-piece chamber of  claim 1  further comprising a lid adapted to cover at least the central piece.  
   
   
       29 . The multi-piece chamber of  claim 28  wherein the lid comprises a flat portion and a plurality of support beams adapted to reduce movement of the flat portion in a vertical direction.  
   
   
       30 . The multi-piece chamber of  claim 29  wherein the flat portion has a thickness of about 0.75 to 1.0 inches or less.  
   
   
       31 . The multi-piece chamber of  claim 29  wherein the lid comprises at least one hatch adapted to provide access to an inner region of the multi-piece chamber without requiring the lid to be removed.  
   
   
       32 . The multi-piece chamber of  claim 31  wherein the lid comprises at least two hatches, each adapted to provide access to an inner region of the multi-piece chamber without requiring the lid to be removed.  
   
   
       33 . A multi-piece chamber comprising: 
 a central piece having: 
 a first open side;  
 a second open side opposite the first open side;  
 a first facet between the first open side and the second open side, the first facet adapted to couple to a chamber and having an opening sized to allow a substrate to pass through the opening; and  
 a second facet opposite the first facet and between the first open side and the second open side, the second facet adapted to couple to a chamber and having at least two vertically stacked openings each sized to allow a substrate to pass through the opening;  
   a first side piece adapted to couple with the first open side of the central piece, the first side piece having at least a first facet with an opening sized to allow a substrate to pass through the opening; and    a second side piece adapted to couple with the second open side of the central piece, the second side piece having at least a first facet with an opening sized to allow a substrate to pass through the opening;    wherein the opening of the first facet of the first side piece, the opening of the first facet of the second side piece and a first opening of the second facet of the central piece are at substantially the same elevation when the first side piece, the second side piece and the central piece are coupled together, and    wherein the first side piece includes a top portion having at least one opening.    
   
   
       34 . The multi-piece chamber of  claim 33  wherein the opening of the first facet of the central piece is at substantially the same elevation as the first opening of the second facet of the central piece.  
   
   
       35 . The multi-piece chamber of  claim 33  wherein the central piece, the first side piece and the second side piece form a substantially cylindrical inner chamber region when coupled together.  
   
   
       36 . The multi-piece chamber of  claim 33  wherein the central piece includes a bottom having a domed portion.  
   
   
       37 . The multi-piece chamber of  claim 36  wherein the domed portion is adapted to couple to a vacuum robot.  
   
   
       38 . The multi-piece chamber of  claim 36  wherein the domed portion includes at least one support fin adapted to reduce movement of the domed portion in a vertical direction.  
   
   
       39 . The multi-piece chamber of  claim 36  wherein the bottom of the central piece includes a flat portion.  
   
   
       40 . The multi-piece chamber of  claim 39  wherein the flat portion has a first thickness and the domed portion has a second thickness that is less than the first thickness.  
   
   
       41 . A multi-piece chamber comprising: 
 a central piece having a first side, a second side and a bottom having a domed portion;    a first side piece adapted to couple with the first side of the central piece and including an opening in a top portion of the first side piece; and    a second side piece adapted to couple with the second side of the central piece.    
   
   
       42 . The multi-piece chamber of  claim 41  wherein the domed portion is adapted to accommodate a vacuum robot.  
   
   
       43 . The multi-piece chamber of  claim 41  wherein the domed portion includes at least one support fin adapted to reduce movement of the domed portion in a vertical direction.  
   
   
       44 . The multi-piece chamber of  claim 43  wherein the domed portion includes a plurality of support fins, each support fin adapted to reduce movement of the domed portion in a vertical direction.  
   
   
       45 . The multi-piece chamber of  claim 41  wherein the bottom of the central piece includes a flat portion.  
   
   
       46 . The multi-piece chamber of  claim 45  wherein the flat portion has a first thickness and the domed portion has a second thickness that is less than the first thickness.  
   
   
       47 . The multi-piece chamber of  claim 46  wherein the first thickness is about 0.75 to 1.0 inches or less and the second thickness is about 0.375 inches or less.  
   
   
       48 . The multi-piece chamber of  claim 41  wherein the first and second side pieces each include mounting surfaces adapted to facilitate coupling the first and second side pieces to the central piece, and 
 wherein the mounting surfaces each have an area that is 35% or more of a total cross-sectional area of each of the first and second side pieces where the side pieces couple to the central piece.    
   
   
       49 . The multi-piece chamber of  claim 41  wherein the first side piece includes a first face, 
 wherein the first face includes a first opening and a first mounting surface,    wherein the first face has a first total surface area that includes an area of the first opening and an area of the first mounting surface,    wherein the first mounting surface is adapted to facilitate coupling the first side piece to the central piece, and    wherein the area of the first mounting surface is 35% or more of the first total surface area.    
   
   
       50 . The multi-piece chamber of  claim 49  wherein the second side piece includes a second face, 
 wherein the second face includes a second opening and a second mounting surface,    wherein the second face has a second total surface area that includes an area of the second opening and an area of the second mounting surface,    wherein the second mounting surface is adapted to facilitate coupling the second side piece to the central piece,    wherein the area of the second mounting surface is 35% or more of the second total surface area.    
   
   
       51 . The multi-piece chamber of  claim 41  wherein the first and second side pieces each include two openings in a top portion of each of the first and second side pieces.  
   
   
       52 . The multi-piece chamber of  claim 51  further including lids adapted to seal the openings in the first and second side pieces.  
   
   
       53 . The multi-piece chamber of  claim 41  wherein the first and second side pieces each include mounting surfaces adapted to facilitate coupling the first and second side pieces to the central piece, and 
 wherein the mounting surfaces each have an area that is 40% or more of a total cross-sectional area of each of the first and second side pieces where the side pieces couple to the central piece.    
   
   
       54 . The multi-piece chamber of  claim 41  wherein the first side piece includes a first face, 
 wherein the first face includes a first opening and a first mounting surface,    wherein the first face has a first total surface area that includes an area of the first opening and an area of the first mounting surface,    wherein the first mounting surface is adapted to facilitate coupling the first side piece to the central piece, and    wherein the area of the first mounting surface is 40% or more of the first total surface area.    
   
   
       55 . The multi-piece chamber of  claim 54  wherein the second side piece includes a second face, 
 wherein the second face includes a second opening and a second mounting surface,    wherein the second face has a second total surface area that includes an area of the second opening and an area of the second mounting surface,    wherein the second mounting surface is adapted to facilitate coupling the second side piece to the central piece,    wherein the area of the second mounting surface is 40% or more of the second total surface area.