Inventor · disambiguated record
Makoto Inagawa
Also filed as: INAGAWA MAKOTO
37 granted patents·30 pending applications·368 citations·filing 1990–2024
97Inventor score
Files withAPPLIED MATERIALS INC33INAGAWA MAKOTO9KURITA SHINICHI6HOSOKAWA AKIHIRO4APPLIED KOMATSU TECHNOLOGY INC2
Top patents by PatentIndex Score
67 records- 0196US9382621B2Ground return for plasma processesCHOI SOO YOUNG·Filed 2010·Granted Jul 5, 2016·27 cites·33 claims
- 0293US7815782B2PVD targetAPPLIED MATERIALS INC·Filed 2006·Granted Oct 19, 2010·17 cites·4 claims
- 0391US7432184B2Integrated PVD system using designated PVD chambersAPPLIED MATERIALS INC·Filed 2005·Granted Oct 7, 2008·18 cites·7 claims
- 0491US7429718B2Heating and cooling of substrate supportAPPLIED MATERIALS INC·Filed 2005·Granted Sep 30, 2008·17 cites·6 claims
- 0588US8182661B2Controllable target coolingTANASE YOSHIAKI·Filed 2005·Granted May 22, 2012·11 cites·18 claims
- 0684US9922854B2Vertical inline CVD systemKURITA SHINICHI·Filed 2011·Granted Mar 20, 2018·7 cites·10 claims
- 0783US7442900B2Chamber for uniform heating of large area substratesAPPLIED MATERIALS INC·Filed 2006·Granted Oct 28, 2008·7 cites·20 claims
- 0882US8097133B2Evacuable magnetron chamberINAGAWA MAKOTO·Filed 2005·Granted Jan 17, 2012·5 cites·18 claims
- 0981US8070408B2Load lock chamber for large area substrate processing systemBEHDJAT MEHRAN·Filed 2008·Granted Dec 6, 2011·8 cites·16 claims
- 1079US7652227B2Heating and cooling plate for a vacuum chamberAPPLIED MATERIALS INC·Filed 2006·Granted Jan 26, 2010·6 cites·20 claims
- 1179US6918864B1Roller that avoids substrate slippageAPPLIED MATERIALS INC·Filed 2000·Granted Jul 19, 2005·19 cites·13 claims
- 1279US6773562B1Shadow frame for substrate processingAPPLIED MATERIALS INC·Filed 1998·Granted Aug 10, 2004·54 cites·2 claims
- 1379US6516816B1Spin-rinse-dryerAPPLIED MATERIALS INC·Filed 2000·Granted Feb 11, 2003·21 cites·47 claims
- 1476US6897411B2Heated substrate supportAPPLIED MATERIALS INC·Filed 2002·Granted May 24, 2005·19 cites·11 claims
- 1574US7440091B2Sensors for dynamically detecting substrate breakage and misalignment of a moving substrateAPPLIED MATERIALS INC·Filed 2004·Granted Oct 21, 2008·16 cites·20 claims
- 1672US6998579B2Chamber for uniform substrate heatingAPPLIED MATERIALS INC·Filed 2003·Granted Feb 14, 2006·14 cites·22 claims
- 1771US7879210B2Partially suspended rolling magnetronAPPLIED MATERIALS INC·Filed 2006·Granted Feb 1, 2011·2 cites·33 claims
- 1870US8961756B2Ganged scanning of multiple magnetrons, especially two level folded magnetronsINAGAWA MAKOTO·Filed 2007·Granted Feb 24, 2015·2 cites·14 claims
- 1969US10265868B2Transfer robot with substrate coolingKURITA SHINICHI·Filed 2011·Granted Apr 23, 2019·2 cites·20 claims
- 2069US9691650B2Substrate transfer robot with chamber and substrate monitoring capabilityKURITA SHINICHI·Filed 2010·Granted Jun 27, 2017·2 cites·24 claims
- 2168US9222165B2Cooled PVD shieldHOSOKAWA AKIHIRO·Filed 2012·Granted Dec 29, 2015·2 cites·20 claims
- 2267US10453718B2Slit valve door with moving mating partAPPLIED MATERIALS INC·Filed 2013·Granted Oct 22, 2019·1 cites·6 claims
- 2367US6257045B1Automated substrate processing systems and methodsAPPLIED KOMATSU TECHNOLOGY INC·Filed 1999·Granted Jul 10, 2001·31 cites·29 claims
- 2466US7834994B2Sensors for dynamically detecting substrate breakage and misalignment of a moving substrateAPPLIED MATERIALS INC·Filed 2008·Granted Nov 16, 2010·2 cites·29 claims
- 2566US2025027887A1Systems and methods for inspecting a substrateAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2664US8528762B2Electron beam welding of large vacuum chamber body having a high emissivity coatingKURITA SHINICHI·Filed 2009·Granted Sep 10, 2013·1 cites·15 claims
- 2762US8567756B2Slit valve door able to compensate for chamber deflectionBEHDJAT MEHRAN·Filed 2009·Granted Oct 29, 2013·1 cites·6 claims
- 2861US5107718ACombined hydraulic motor and speed reducerKOMATSU MFG CO LTD·Filed 1990·Granted Apr 28, 1992·17 cites·5 claims
- 2961US2007261951A1Reactive sputtering zinc oxide transparent conductive oxides onto large area substratesYE YAN·Filed 2007·Application pending·0 cites
- 3060US2012000424A1Cooled dark space shield for multi-cathode designINAGAWA MAKOTO·Filed 2011·Application pending·0 cites
- 3160US2012000773A1Reactive sputtering zinc oxide transparent conductive oxides onto large area substratesYE YAN·Filed 2011·Application pending·0 cites
- 3259US6205870B1Automated substrate processing systems and methodsAPPLIED KOMATSU TECHNOLOGY INC·Filed 1997·Granted Mar 27, 2001·22 cites·22 claims
- 3359US2007295598A1Backing plate assemblyINAGAWA MAKOTO·Filed 2006·Application pending·0 cites
- 3457US2008017501A1Cooled dark space shield for multi-cathode designINAGAWA MAKOTO·Filed 2007·Application pending·0 cites
- 3556US2008006523A1Cooled pvd shieldHOSOKAWA AKIHIRO·Filed 2007·Application pending·0 cites
- 3655US2025178219A1Esd prevention by resistive coatings of robot end effector fingers and conductive padAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3753US10294559B2Target cooling through gun drilled holesTANASE YOSHIAKI·Filed 2012·Granted May 21, 2019·0 cites·23 claims
- 3852US8915389B2Electron beam welding of large vacuum chamber body having a high emissivity coatingAPPLIED MATERIALS INC·Filed 2013·Granted Dec 23, 2014·0 cites·18 claims
- 3951US10604846B2Thin film encapsulation mask preheat and substrate buffer chamberAPPLIED MATERIALS INC·Filed 2017·Granted Mar 31, 2020·0 cites·21 claims
- 4051USD670372SHeater plate and heater element assemblyINAGAWA MAKOTO·Filed 2011·Granted Nov 6, 2012·6 cites·1 claims
- 4151US2009321399A1Dynamic scribe alignment for laser scribing, welding or any patterning systemAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 4251US2008067058A1Monolithic target for flat panel applicationSTIMSON BRADLEY O·Filed 2007·Application pending·0 cites
- 4350US2007012559A1Method of improving magnetron sputtering of large-area substrates using a removable anodeAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 4450US2008011601A1Cooled anodesAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 4550US2006292310A1Process kit design to reduce particle generationAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 4649USD622744SLoad lock roller ball supportAPPLIED MATERIALS INC·Filed 2008·Granted Aug 31, 2010·6 cites·1 claims
- 4749US2010011785A1Tube diffuser for load lock chamberAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 4849US2006189465A1Roller that avoids substrate slippageAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 4949US2007151841A1Flexible magnetron including partial rolling support and centering pinsAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 5048US2008023319A1Magnetron assemblyLE HIEN MINH HUU·Filed 2007·Application pending·0 cites
Showing the top 50 of 67 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →