Scanning probe device and processing method of scanning probe

Abstract

There is provided a device in which a probe can be used for both of observation and correction, and which can, even if a next generation photomask of ultra minute structure is made an object, perform a desired processing without injuring a normal portion in a process of obtaining information of a position and a shape of a defect part, and without impairing the probe also at a processing time. It has been adapted such that, at an observation time, a contact pressure between a probe and a mask is reduced to 0.1 nN by applying a vibration of 1 kHz to 1 MHz to the probe. It has been adapted such that a cantilever used in the present invention is formed by a silicon material of 100-600 μm in length and 5-50 μm in thickness and, at the observation time, the probe contacts with the mask at the contact pressure of 0.1 nN and, at the processing time, a defect correction can be performed by causing the probe to contact with the mask at the contact pressure of 10 nN to 1 mN.

1 - 13 . (canceled)  
     
     
         14 . A scanning probe device which processes a shape information of a sample surface or a sample by causing a probe to approach to or contact with the sample surface, 
 characterized by possessing a sample base on which the sample is disposed, a moving means which possesses a cantilever having in its tip the probe above the sample and moves the cantilever with the cantilever being fixed to a tip, and a displacement detection means which detects a displacement of the cantilever, and    in that the cantilever is 100-600 μm in length, 5-50 μm in thickness, and formed by a silicon material.    
     
     
         15 . A scanning probe device according to  claim 14 , characterized in that the displacement detection means is an optical lever method in which a laser light i ˜  irradiated to the cantilever, and a reflected light at the cantilever is detected by a light detector.  
     
     
         16 . A scanning probe device according to  claim 14 , characterized in that the displacement detection means uses a self detecting type probe in which a displacement sensor has been built in the cantilever.  
     
     
         17 . A scanning probe device according to  claim 14 , characterized by possessing a vibrator which vibrates the cantilever.