Dynamic Schottky barrier MOSFET device and method of manufacture

Abstract

A device for regulating a flow of electric current and its manufacturing method are provided. The device includes metal-insulator-semiconductor source-drain contacts forming Schottky barrier or Schottky-like junctions to the semiconductor substrate. The device includes an interfacial layer between the semiconductor substrate and a metal source and/or drain electrode, thereby dynamically adjusting a Schottky barrier height by applying different bias conditions. The dynamic Schottky barrier modulation provides increased electric current for low drain bias conditions, reducing the sub-linear turn-on characteristic of Schottky barrier MOSFET devices and improving device performance.

1 - 6 . (canceled)  
   
   
       7 . A method of manufacturing a MOSFET device for regulating a flow of electrical current, the method comprising: 
 providing a gate electrode on a semiconductor substrate;    exposing the semiconductor substrate in an area proximal to the gate electrode;    etching the semiconductor substrate on the exposed area using an at least partially isotropic etch;    depositing a thin film of metal in the etched area of the semiconductor substrate; and    reacting the metal with the semiconductor substrate such that at least one of a Schottky or Schottky-like source electrode and drain electrode is formed.    
   
   
       8 . The method of  claim 7  wherein the etching step is performed using an etch having a lateral etch rate of from approximately one-tenth to ten times of a vertical etch rate.  
   
   
       9 . The method of  claim 7  wherein the etching step is performed using an etch having approximately the same lateral and vertical etch rates.  
   
   
       10 . The method of  claim 7  wherein the gate electrode is provided by the steps comprising: 
 providing a thin insulating layer on the semiconductor substrate;    depositing a thin conducting film on the thin insulating layer;    patterning and etching the thin conducting film to form the gate electrode; and    forming at least one thin insulating layer on at least one sidewall of the gate electrode.    
   
   
       11 . The method of  claim 7  further comprising removing unreacted metal from the MOSFET device after forming the Schottky or Schottky-like source and drain electrodes.  
   
   
       12 . The method of  claim 7  wherein the reacting step is performed by thermal annealing.  
   
   
       13 . The method of  claim 7  wherein the source electrode and the drain electrode are formed from a member of the group consisting of: Platinum Silicide, Palladium Silicide and Iridium Silicide, and channel dopants in the semiconductor substrate are selected from the group consisting of: Arsenic, Phosphorous, and Antimony.  
   
   
       14 . The method of  claim 7  wherein the source electrode and the drain electrode are formed from a member of the group consisting of the rare-earth silicides, and channel dopants in the semiconductor substrate are selected from the group consisting of: Boron, Indium, and Gallium.  
   
   
       15 . The method of  claim 7  wherein Schottky or Schottky-like contact is formed at least in areas adjacent to a channel between the source and drain electrodes.  
   
   
       16 . The method of  claim 7  wherein an entire surface of the at least one of the source electrode and the drain electrode forms a Schottky or Schottky-like contact with the semiconductor substrate.  
   
   
       17 . The method of  claim 7  wherein before the step of providing the gate electrode, dopants are introduced into the semiconductor substrate.  
   
   
       18 . The method of  claim 7  wherein the semiconductor substrate has a channel dopant concentration that varies significantly in a vertical direction and is generally constant in a lateral direction.  
   
   
       19 . A method of manufacturing a device for regulating a flow of electrical current, the method comprising: 
 exposing a semiconductor substrate in an area proximal to a gate electrode;    etching the semiconductor substrate on the exposed area using an at least partially isotropic etch;    and depositing and thermally annealing a thin film of metal with the semiconductor substrate such that a Schottky or Schottky-like source electrode and drain electrode is formed.    
   
   
       20 . The method of  claim 19  wherein the etching step is performed using an etch having a lateral etch rate of from approximately one-tenth to ten times of a vertical etch rate.  
   
   
       21 . The method of  claim 19  wherein the etching step is performed using an etch having approximately the same lateral and vertical etch rates.  
   
   
       22 . The method of  claim 19  wherein the etching step is performed using an etch having lateral and vertical etch rates such that a channel width of the device is reduced by between approximately 1 and 50 percent.  
   
   
       23 . The method of  claim 19  wherein the semiconductor substrate is heated during the depositing step, to encourage surface diffusion of metal atoms along a surface of the semiconductor substrate.